Vacuum nanogaps are expected as small-sized, high-efficiency thermoelectric devices due to their high thermal insulation by vacuum and high conductivity due to thermionic emission and field emission between nanogap. We proposed a cleavage fracture of single crystal silicon as a method to fabricate nanogaps with large area and parallel smooth In this research, we have developed devices and systems capable of nanogap formation, measurement of gap distance and current measurement in SEM, and evaluated cleavage nanogap.
[Applications]
- Thermal generator
- Chip refrigeration
