New Lab. Member (from April 1st)
４月１日から新しく９名が研究室メンバーに加わりました．皆さまよろしくお願いします。 博士課程 PhD student 山下 直輝 Naoki Yamashita 修士1回生 Master course in the 1st grade 大牧 […]
Yearly Archives: 2015
IFCS-EFTF 2015
The 2015 Joint Conference of the IEEE International Frequency Control Symposium & European Frequency and Time Forum […]
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for consumer and automobile applications. Our purpose is high sensi […]
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in harsh environments. Si […]
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their operations, evaluation […]
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as nanostructure eleme […]
Selective assembly of DNA origami bridging over a trenched Si substrate
We demonstrated for the first time the versatility of the integration method of DNA origami on MEMS by selectively assem […]
Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements of nano devices because of its attractive properties. We are […]
Mechanical properties characterization of DNA origami
DNA origami is one of the most promising methods to form nano-scale structures or Nano/micro systems. However the effect […]
Process Parameter Optimizer
Grayscale lithography has been attracting huge attention recent years as a solution to 3D microstructuring for MEMS appl […]
MEMS device for heat transfer measurement using nanogap
In recent years, nano-gap electrodes are reported to realize high efficient thermoelectric generators. To evaluate elect […]
