Piezoelectric Cylinder Gyroscope

In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, which are important for realizing such automatic operation, is expected to increase. MEMS piezoelectric vibration gyros, which are compact, low-cost, and high-performance, have attracted much attention. In our previous research, a cylindrical gyro using lithium niobate, which is expected to have high performance, was developed. However, high performance could not be obtained due to mode mismatch caused by elastic anisotropy. In this study, we reduce mode mismatch by adjusting the wall thickness, and successfully detected angular velocity. Scale factor was 13.3 µV/°/sec, and bias instability was 135°/h.

[Applications]

•　attitude control

•　 automatic driving