MEMS Reservoir Computing using Frequency Modulated Accelerometer
For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers that can learn and c ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, which are importa ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibrating ring gyros h ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensitive sensors of ma ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic computing, Reservoir computing (RC) is expected to be one ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient mass-sensor since a miniscule variation of its mass (in ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is used for time series data processing like classification or ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyroscope (VRG) has bee ...