Parallel tensile testing device with integrated shear strain gauge for single crystal silicon
せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計，作製し高い負荷周波数での引張疲労試験の実現を目指します．
Chamber for Diffracted X-ray Tracking
Diffracted X-ray Tracking (DXT) method is real-time imaging technique to measure dynamic conformatio ...
Reliability comparison of Si-based and SOI-based micro mirror resonator
Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異種材料接合を行いました．
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...
Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．
Vacuum encapsulation of MEMS using self-propagating heat reaction of Al/Ni multilayer film
Development of a new vacuum sealing technology for MEMS resonating devices such as gyroscopes and re ...
Double stage electrode type Ionic liquids electrospray thruster
through-hole dry etching with Ni electroplated as a mask.