MEMS Reservoir Computing using Frequency Modulated Accelerometer

For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers tha ...
Piezoelectric Cylindrical Vibrating Gyroscope

In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...
Ionic liquids electrospray thruster

We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounte ...
(100) silicon ring gyroscope

In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibra ...
TEER measurement microfluidic device

Organ on a Chip is a microfluidic device to culture human cells and reproduce the organ in vitro, wh ...
Ultrathin Si resonator for gas sensing

Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...
Reliability of Single-Crystal Silicon Micromirrors

The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...
Coupled MEMS resonators for reservoir computing

Among hardware implementation methods of neuromorphic computing, Reservoir computing (RC) is e ...