Research

　For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers tha ...

In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...

We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounte ...

In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibra ...

Organ on a Chip is a microfluidic device to culture human cells and reproduce the organ in vitro, wh ...

Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...

The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...

Among hardware implementation methods of  neuromorphic computing, Reservoir computing (RC) is e ...