Research

To improve the performance of MEMS vibration gyros, it is necessary to make the stiffness of the res ...

We develop the ionic liquid electrospray thruster (ILEST) to aim the thruster of the nano-spacecraft ...

Reservoir computing(RC) is a machine learning approach having small learning cost and expected as th ...

熱ストレスの小さいMEMS真空封止技術を実現することを目的として，ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を局所加熱源として用いる手法を提案する．本研究では，MEMS振動子を作製したチップ ...

Miniaturization and reduced power consumption of atomic-based devices have been required. Furthermor ...

In this research, a single crystal silicon beam was cleaved in a scanning electron microscope(SEM)an ...

Organ on a Chip is a microfluidic device to culture human cells and reproduce the organ in vitro, wh ...

シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う