ILEST with two-stage electrodes

We develop the ionic liquid electrospray thruster (ILEST) to aim the thruster of the nano-spacecraft ...
MEMS Reservoir Computing with accelerometer

Reservoir computing(RC) is a machine learning approach having small learning cost and expected as th ...
Al/Ni多層膜の自己伝播発熱反応を用いたMEMS振動型デバイスの真空封止

熱ストレスの小さいMEMS真空封止技術を実現することを目的として,ナノスケール厚で積層させたAl/Ni膜の合金化反応熱を局所加熱源として用いる手法を提案する.本研究では,MEMS振動子を作製したチップ ...
Microfabricated alkali metal vapor cells

Miniaturization and reduced power consumption of atomic-based devices have been required. Furthermor ...
MEMS Nanogap Device

In this research, a single crystal silicon beam was cleaved in a scanning electron microscope(SEM)an ...
TEER measurement microfluidic device

Organ on a Chip is a microfluidic device to culture human cells and reproduce the organ in vitro, wh ...
Temperature dependence of electron emission between cleavage planes for thermionic power generation

シリコンへき開破壊によって作製したナノギャップ間電子放出の温度依存性評価を行う
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon

せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.