Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by temp […]
Research
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mechanical reliability is […]
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]
Microfluidic system for medical diagnosis
In medical field, microfluidic system have many merits for medical diagnosis system. We constructed microfluidic cell so […]
MEMS Tensile testing of Integrated Si Nanowire
Siナノワイヤは機械的・電気的特性に優れ，これをナノスケール構造体要素として用いた幅広い応用デバイスが注目されています．これらのデバイスの実現と信頼性の向上のため，MEMS構造体への一括集積化技術とその機械特性評価をおこなっています． 【応 […]
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by using in-plane and o […]
Self-assembling of DNA Origami with Ultrasonic Vibration
Self-assembling of DNA Origami with Ultrasonic Vibration We aim to establish a new nanofabrication technology for next g […]
Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy
The aim of this research is to analyze local and instantaneous stress in resonating single-crystal silicon (SCS) microst […]
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, small size, and easily integrated with ASIC. Therefore, MEMS vi […]
Fabrication of Nano-Gap Electrode using Gold Nano-Rod Growth on Substrate
Nanogap electrodes are necessary to realize nanotechnology devices such as single molecular transistor and molecular sen […]
Tensile Testing for Carbon Nanotube using Electrostatic MEMS
We are developing the method for tensile test of Carbon nanotube (CNT) which enables to obtain sufficient data to exa […]
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricated with microfabrication method, and contain mechanical and e […]
