Fabrication of Micro-channel with Molecular filter using Epoxy Negative Resist

  The processing technology which fabricates 3D microstructure like microfluidics via UV photolithography has attracted many researchers. Adopting original moving-mask UV lithography, we have developed the new our technique to fabricate microfluidics with the free-standing porous membrane made of epoxy-based negative photoresist. If the permeability rate of the free-standing membrane is controllable, it is expected to apply the microfluidics as molecular filter to biological or medical devices like bioassay. In this research, our objective is to establish the fabrication technology of the microfluidics with molecular filtering function and demonstrate the permeability characteristics for the advanced microfluidic systems.



[International Conference]

  • Yoshikazu Hirai, Yusuke Nakai, Yoshihide Makino, Koji Sugano, Toshiyuki Tsuchiya, Osamu Tabata,“Epoxy-Based Permeable Membrane Fabrication for 3D Microfluidic Device”, NEMS2011, Kaohsiung, Taiwan, 2011