Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...
Ionic liquids electrospray thruster
We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounte ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibra ...
TEER measurement microfluidic device
Organ on a Chip is a microfluidic device to culture human cells and reproduce the organ in vitro, wh ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...
Reliability of Single-Crystal Silicon Micromirrors
The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic computing, Reservoir computing (RC) is e ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient mass-sensor since a miniscule variation ...