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Miniaturization and reduced power consumption of atomic-based devices have been required. Furthermor ...

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 For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers tha ...

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In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...

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We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounte ...

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In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibra ...

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Organ on a Chip is a microfluidic device to culture human cells and reproduce the organ in vitro, wh ...

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Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...

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The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...