Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes ...
Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams o ...
Properties of nanogap with single crystal silicon cleavage planes
Thermionic generation generates electricity by collecting thermionic electrons emitted from the high ...
Physical Reservoir Computing Using Nonlinear Heat Conduction
As the demand for machine learning and data analysis increases with the rapid informatization of soc ...
Flexible 3ω sensor
Thermal properties of fluids are needed when designing or evaluating thermal devices. In this resear ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as promising candidates for constructing ultras ...
Thermionic generation with Nanogap
Thermionic generation is a method of power generation in which power is generated by collecting emit ...
Microfabricated alkali metal vapor cells
Miniaturization and reduced power consumption of atomic-based devices have been required. Furthermor ...