a-C:H多層膜被覆によるSi構造の強靭化

The a-C:H (Hydrogenated Amorphous Carbon) film is one of the promising coating material in MEMS industry due to its many desirable properties. The alternating multilayer coating deposited by changing bias voltage alternately (-200 V/-600 V) is an effective solution to release the internal stress. The modification of the interface regions between the substrate and the layers ensures a good adhesion. In this research, The tensile testing was carried on a micro-scaled Si structure which was fully coated by a-C:H film with different alternating types by PECVD method.

[Applications]

The tensile data of alternately coated  Si micro structure samples for optimum design by adopting a-C:H coated MEMS to improve the reliability of  MEMS device.

[Publication]

  • Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fracture behavior of Single-crystal Silicon Microstructure Coated with Stepwise Bias-graded a-C:H Film
    Surface and Coatings Technology, Vol. 405, 126559 (2021). DOI: 10.1016/j.surfcoat.2020.126559

Micromaterial,ResearchDLC,Tensile test