Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliability of such product […]
投稿タグ： シリコン
Tensile testing of silicon at high temperature
Structural materials of MEMS are silicon, silicon compound, and so on. Silicon’s mechanical property is affected by temp […]
Reliability evaluation of silicon microstructure
Silicon is a widely-used material for MEMS devices structure. It is a brittle material, so its mechanical reliability is […]
