MEMS fabricated nanogap electrodes
We have developed […]
Parallel tensile testing device with integrated shear strain gauge for ...
In order to shorte […]
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW ...
MEMS torsional mic […]
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromir […]
Measurement of temperature difference between cleavage plane nanogap using micro ...
Vacuum nanogap ele […]
Control of Gold Nano Dimer Structure with DNA Origami Molds
DNA origami is a m […]
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror […]
MEMS fabricated conformal electrodes for thermotunneling applications
We developed a mic […]
Parallel tensile testing device with integrated shear strain gauge for ...
In order to shorte […]