DNA origami, a 100nm scale sheet made of a long circular DNA and many short staple DNAs, is expected to play an important role in many fields such as engineering and biology. DNA origami is utilized as a building block to form higher order complicated structure with nano-scale structure. In this study, we propose new methodology to integrate DNA origami with MEMS to realize advanced MEMS with higher functionality such as a MEMS integrated with nano-plasmonic waveguide made of nano-particle.
