せん断型ひずみゲージ集積化単結晶シリコンマイクロ構造並列引張試験デバイス
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro structure, we have developed parallel tensile testing device with integrated strain gauge. This research proposes the parallel tensile fatigue test device integrating shear strain gauge as a load sensor and we aim to realize tensile fatigue test at high load frequency. The high stiffness helps decreasing actuator amplitude and increasing drive frequency, so fatigue testing time will shorten.
[Applications]
- Database of fracture strength of single crystal silicon
- Design guideline of MEMS devices with a higher reliability
- Uesugi, et al., International Microprocesses and Nanotechnology Conference (MNC 2015), 13P-11-124L.
- -K. Yasuda, et. al, International Symposium on Micro-Nano Science and Technology 2016 (MNST 2016), The University of Tokyo, Japan (16 – 18 Dec. 2016).