Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
単結晶ニオブ酸リチウムを用いた圧電ディスク型振動ジャイロを提案した．
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...
Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
MEMS gyroscopes for measuring rate or angle of rotation can be used to provide heading information f ...
10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer and automobile applications. Our purpos ...
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for consumer and automobile applications. Our p ...
Matrix sensitivity calibration for 3-axis accelerometer
Matrix sensitivity calibration has been proposed to evaluate sensitivities of inertial sensors as ve ...
Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, small size, and easily integrated with ASIC ...