Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as promising candidates for constructing ultras ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer
For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers tha ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibra ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic computing, Reservoir computing (RC) is e ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient mass-sensor since a miniscule variation ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is used for time series data processing like ...