Q-factor of Si nanoresonator
Nanoresonator is a mechanical beam with nano-scale thickness capable of showing resonance vibration. ...
Mode-matched (100) silicon ring gyroscope
Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes ...
Flexible 3ω sensor
Thermal properties of fluids are needed when designing or evaluating thermal devices. In this resear ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices have emerged as promising candidates for constructing ultras ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer
For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers tha ...
Piezoelectric Cylindrical Vibrating Gyroscope
In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...
(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibra ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...