(100) silicon ring gyroscope
In recent IoT society, miniaturization and price reduction of sensors have been expected. MEMS vibra ...
Ultrathin Si resonator for gas sensing
Nano-scale mechanical resonator devices are considered potential candidates for building ultrasensit ...
Coupled MEMS resonators for reservoir computing
Among hardware implementation methods of neuromorphic computing, Reservoir computing (RC) is e ...
Nanoscale mechanical resonators for mass-sensing applications
A Nanoscale mechanical resonator can be used as an efficient mass-sensor since a miniscule variation ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is used for time series data processing like ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope has been proposed and fabricated to rea ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is necessary to make the stiffness of the res ...