Piezoelectric Vibrating Gyroscope using Cylindrical Lithium Niobate Resonator

In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...
Electrochemical properties of MXene/CNT thin film

MXene, which is a two-dimensional layered nanomaterial, exhibits excellent electrochemical propertie ...
Q-factor of Si nanoresonator

Nanoresonator is a mechanical beam with nano-scale thickness capable of showing resonance vibration. ...
Mode-matched (100) silicon ring gyroscope

Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes ...
Flexible 3ω sensor

Thermal properties of fluids are needed when designing or evaluating thermal devices. In this resear ...
Ultrathin Si resonator for gas sensing

Nano-scale mechanical resonator devices have emerged as promising candidates for constructing ultras ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer

For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers tha ...
Piezoelectric Cylindrical Vibrating Gyroscope

In recent years, automatic driving has been attracting attention, and the miniaturization of gyros, ...