Thermal field emission between nanogap
Thermionic conversion is a power generation method collects the emitted electrons by giving a temper ...
Strengthen Silicon by alternating a-C:H muilti-layer coating
The a-C:H (Hydrogenated Amorphous Carbon) film is one of the promising coating material in MEMS indu ...
Data processing using MEMS
Reservoir computing is a kind of machine learning that is used for time series data processing like ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensing and media devices. MEMS mirror ...
Geometrically compensated (100) SCS mode-matched vibratory ring gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...
MEMS Based SCS Cleavage Nanogap for Thermionic Generation
Thermionic generation generates electricity by collecting thermionic electrons emitted from the high ...
Single-Crystal LN Piezoelectrical DRG Control System
A mode-matched single-crystal lithium niobate disk gyroscope has been proposed and fabricated to rea ...
Electrostatic tuning for gyroscope
To improve the performance of MEMS vibration gyros, it is necessary to make the stiffness of the res ...