Three-axis capacitive accelerometer
Performance requirements for seismometer are high resolution, low noise level, durability and so on. ...
Electrical equivalent circuit of electrostatic transducer
Electrostatic MEMS devices which are constructed from mechanical structure, electrical circuit and e ...
Electrostatic MEMS for tensile-testing of nanomaterials
In this research, we focus on tensile testing of these materials. The goal of this study is to condu ...