10×10 capacitive accelerometer array
Capacitive accelerometers have been widely used for consumer and automobile applications. Our purpos ...
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’ ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscop ...
A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
MEMS capacitive accelerometers have been widely used for consumer and automobile applications. Our p ...
High-temperature mechanical property of single crystal silicon microstructures
Understanding of high-temperature mechanical property is necessary for the reliability of MEMS in ha ...
Tensile strength of single crystal silicon microstructures
Silicon is a standard material of MEMS. Since MEMS devices need mechanical deformations for their op ...
Tensile test of silicon nanowire by using electrostatic MEMS device
Silicon nanowire has excellent mechanical and electrical properties and is expected to be applies as ...
Characterization of ssDNA modified CNTs
Carbon nanotube (CNT) is expected to be applied to elements of nano devices because of its attractiv ...