Mode-matched (100) silicon ring gyroscope

Recently, IoT society have demanded small-size and low-cost sensors. MEMS vibrating ring gyroscopes have attracted attention. In a previous study, ring resonators were developed using (100) single-crystal silicon, whose fabrication cost is low and variation in material property is small. However, the isotropy was degraded due to fabrication errors. In this study, we designed and fabricated ring resonator with chamfered rectangle springs immune to fabrication errors. As a result, the difference between two resonant frequencies of wineglass-modes is 27.6 Hz, angle random walk is 24.9 deg/√h and bias stability is 277.8 deg/h.

Conference Presentation

Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
Mode-matched (100) single crystal silicon ring gyroscope robust to fabrication errors
The 48th International Conference on Micro & Nano Engineering (MNE) and Eurosensors 2022, Leuven, Belgium (Sep. 19-23, 2022), T2-F-WeA

Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
The 10th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL2023), Kaua’I, Hawaii, USA (March 28-31, 2023)