EUROSENSORS 2015 (http://www.eurosensors2015.org/), the XXIX edition of the conference series, will be held in Freiburg, Germany, from September 6 to 9, 2015. From Tabata Lab., 1 abstract was accepted by the technical program committee as Poster presentation.
TP-G02
Multiple Patterning with Process Optimization Method for Maskless DMD-Based Grayscale Lithography
Xiaoxu Ma, Yoshiki Kato, Floris van Kempen, Yoshikazu Hirai, Toshiyuki Tsuchiya, Fred van Keulen, Osamu Tabata