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The purpose of this research is to realize high fracture strength and long fatigue life micromirrors ...

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The a-C:H (Hydrogenated Amorphous Carbon) film is one of the promising coating material in MEMS indu ...

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せん断型ひずみゲージを集積化した並列引張疲労試験デバイスを設計,作製し高い負荷周波数での引張疲労試験の実現を目指します.

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Comparing with the mature SOI-based micro mirror resonator, the Si-based micro mirror resonator is p ...

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There are two types of fabrication processes for MEMS torsional mirror device. One is the process us ...

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In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...

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DLC (Diamond Like Carbon) film is one of the promising coating material in MEMS industry deal to its ...

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In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...