Paper published! – Sensors and Actuators A:Physical
A paper on research on improving the torsional strength of single-crystal silicon resonators by coating with amorphous carbon was published in Sensors and Actuators A: Physical.
Yuanlin Xia, Lei, Zhong, Jiaxing Tan, Zhuqing Wang, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
Alternating a-C:H Coating Effect on Torsional Strength of Silicon Beam for Micromirrors
Sensors and Actuators A: Physical 363, 114713 (2023).
DOI: 10.1016/j.sna.2023.114713