Synchronized vibration of MEMS mirrors

MEMS torsional micromirror is an optical device that scans reflected light by torsional vibration of ...
Synchronization of MEMS mirror array

MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams o ...
Ionic liquids electrospray thruster

We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounte ...
Reliability of MEMS Mirror

MEMS torsional mirror resonator is a key component for sensing and media devices. MEMS mirror ...
Microchannel integrated MEMS device

Siで構成されるMEMSアクチュエータと,構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い,常温での異種材料接合を行いました.
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices

There are two types of fabrication processes for MEMS torsional mirror device. One is the process us ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams

MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The devic ...
Resonant fatigue testing of single-crystal silicon torsional micromirror

Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mir ...