Actuators

MEMS torsional micromirror is an optical device that scans reflected light by torsional vibration of ...

MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams o ...

We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounte ...

MEMS torsional mirror resonator is a key component for sensing and media devices.  MEMS mirror ...

Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異種材料接合を行いました．

There are two types of fabrication processes for MEMS torsional mirror device. One is the process us ...

MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The devic ...

Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mir ...