Ionic liquids electrospray thruster
We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounted on nanosatellit ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensing and media devices. MEMS mirror can be fabricated ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと，構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い，常温での異種材料接合を行いました．