Synchronization of MEMS mirror array

MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams o ...
Properties of nanogap with single crystal silicon cleavage planes

Thermionic generation generates electricity by collecting thermionic electrons emitted from the high ...
Physical Reservoir Computing Using Nonlinear Heat Conduction

As the demand for machine learning and data analysis increases with the rapid informatization of soc ...
Flexible 3ω sensor

Thermal properties of fluids are needed when designing or evaluating thermal devices. In this resear ...
Ultrathin Si resonator for gas sensing

Nano-scale mechanical resonator devices have emerged as promising candidates for constructing ultras ...
Thermionic generation with Nanogap

Thermionic generation is a method of power generation in which power is generated by collecting emit ...
Microfabricated alkali metal vapor cells

Miniaturization and reduced power consumption of atomic-based devices have been required. Furthermor ...
MEMS Reservoir Computing using Frequency Modulated Accelerometer

For miniaturization and Intelligence of MEMS sensors, we are developing resonant accelerometers tha ...