Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by distortion of eyeball. So deformable mirr ...
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is us ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations caused by eye distortion. We propose and deve ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to co ...
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’ ...
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscop ...
Dynamic Stress Measurement of Silicon
MEMS are often used in various products under vibrating environment. In order to improve the reliabi ...
Electrostatic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system i ...