Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array

Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is n ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array

Inspection light of retinal observation is warped by distortion of eyeball. So deformable mirr ...
Resonant mirror scanner using SiNW

Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is us ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array

Deformable mirror is used for compensating aberrations caused by eye distortion. We propose and deve ...
MEMS Deformable Mirror Actuated By Electrostatic Piston Array

Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to co ...
Electrostatic deformable mirror with moving substrate

Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’ ...
Time-resolved Raman stress measurement

In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscop ...
Dynamic Stress Measurement of Silicon

MEMS are often used in various products under vibrating environment. In order to improve the reliabi ...