Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The device is used for variou […]
Actuators
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mirror devices can scan […]
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is necessary to control […]
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of retinal observation is warped by distortion of eyeball. So deformable mirrors (DMs) to correct wave […]
Resonant mirror scanner using SiNW
Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is used for various applicatio […]
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used for compensating aberrations caused by eye distortion. We propose and develop new type of DM, […]
Electromagnetic-driven deformable mirror device
Adaptive optics is a significant device that corrects the wavefront aberrations. This system is composed of deformable m […]
MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to correct light instantl […]
Electromagnetic-driven deformable mirror device
Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]
Lithography of composite material
Composite material consisted of base material and fillers is new material for micro device represented by MEMS. The conc […]
Electrostatic deformable mirror with moving substrate
Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’s required to correc […]
Time-resolved Raman stress measurement
In this research, we measured the local dynamic stress on Si resonator using micro Raman spectroscopy. In order to achie […]
