Actuators

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Fabrication process effect on torsional strength of SCS beam for resonant mirror devices

This entry was posted in Actuators Micromaterial Research on Monday June 10th, 2019

There are two types of fabrication processes for MEMS torsional mirror device. One is the process using SOI wafer, and t […]

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Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams

This entry was posted in Actuators Nanomaterials Research on Wednesday June 6th, 2018

MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The device is used for variou […]

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Resonant fatigue testing of single-crystal silicon torsional micromirror

This entry was posted in Actuators Micromaterial Research on Wednesday June 6th, 2018

Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mirror devices can scan […]

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Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array

This entry was posted in Actuators Research on Wednesday June 6th, 2018

Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is necessary to control […]

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Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array

This entry was posted in Actuators Research on Saturday April 8th, 2017

 Inspection light of retinal observation is warped by distortion of eyeball. So deformable mirrors (DMs) to correct wave […]

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Resonant mirror scanner using SiNW

This entry was posted in Actuators Micromaterial Research on Saturday April 8th, 2017

 Torsion mirror is a scanning device that scans a laser beam by reflecting it. The device is used for various applicatio […]

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MEMS Deformable Mirror Actuated By Electrostatic Piston Array

This entry was posted in Actuators Research on Saturday April 8th, 2017

Deformable mirror is used for compensating aberrations caused by eye distortion. We propose and develop new type of DM, […]

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Electromagnetic-driven deformable mirror device

This entry was posted in Actuators Research on Friday April 1st, 2016

Adaptive optics is a significant device that corrects the wavefront aberrations. This system is composed of deformable m […]

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MEMS Deformable Mirror Actuated By Electrostatic Piston Array

This entry was posted in Actuators Research on Friday April 1st, 2016

Inspection light of funduscopy is warped by distortion of eyeball. So deformable mirrors (DMs) to correct light instantl […]

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Electromagnetic-driven deformable mirror device

This entry was posted in Actuators Research on Monday April 20th, 2015

Adaptive optics (AO) is a significant device that corrects the wave front aberrations. This system is composed of a defo […]

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Lithography of composite material

This entry was posted in Actuators Fabrication Research on Monday April 20th, 2015

Composite material consisted of base material and fillers is new material for micro device represented by MEMS. The conc […]

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Electrostatic deformable mirror with moving substrate

This entry was posted in Actuators Research on Monday April 20th, 2015

Inspection light of funduscopy is warped by distortion of eyeballs and atmospheric vibration. So it’s required to correc […]

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