Synchronization of MEMS mirror array
MEMS mirrors are optical devices that scan reflected light by torsional vibration of support beams o ...
Ionic liquids electrospray thruster
We have developed Ionic liquids electrospray thruster (ILEST) for a new thruster which can be mounte ...
Reliability of MEMS Mirror
MEMS torsional mirror resonator is a key component for sensing and media devices. MEMS mirror ...
Microchannel integrated MEMS device
Siで構成されるMEMSアクチュエータと,構造を封止する透明材料の接合プロセスとして水蒸気プラズマ処理を用い,常温での異種材料接合を行いました.
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsional mirror device. One is the process us ...
Reliability enhancement of MEMS tilt-mirror using scale effect of SiNW beams
MEMS torsional micro mirror is a scanning device that scans a laser beam by reflecting it. The devic ...
Resonant fatigue testing of single-crystal silicon torsional micromirror
Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mir ...
Fabrication of MEMS Deformable Mirror Actuated By Electrostatic Piston Array
Deformable mirror is used in adaptive optics for retinal observation with higher resolution. it is n ...