Books, Memoirs, Others

1. Toshiyuki Tsuchiya, Hiroyuki Tokusaki, Yoshikazu Hirai, Koji Sugano, Osamu Tabata, “Self-dependent Equivalent Circuit Modeling of Electrostatic Comb Transducers for Integrated MEMS”, VLSI-SoC: The Advanced Research for Systems on Chip, Eds. S. Mir et al., Boston: Springer, 2012, pp.94-109.
   【link】

2009

1. Jan G. Korvink, Sadik Hafizovic, Yoshikazu Hirai, Pascal Meyer, “Exposure and Development Simulation for Deep X-ray LIGA”, Advanced Micro and Nanosystems (Volume. 7): LIGA and Its Applications, Eds. V. Saile et al., Weinheim: Wiley-VCH, 2009, pp.103-142.
   【link】

1. Yoshikazu Hirai, Naoki Matsuzuka, Osamu Tabata, “Effective 3-D Process Modeling and Parameters Determination on Double Exposure in Deep X-ray Lithography”, 2006 Memoirs of the SR Center Ritsumeikan University, Ritsumeikan University, April, 2006, pp.45-54.

2005

1. Yoshikazu Hirai, Sadik Hafizovic, Naoki Matsuzuka, Jan G. Korvink, Osamu Tabata, “Process Simulation of Moving Mask Deep X-Ray Lithography”, 2005 Memoirs of the SR Center Ritsumeikan University, Ritsumeikan University, April, 2005, pp.83-94.

2004

1. Naoki Matsuzuka, Yoshikazu Hirai, Osamu Tabata, “3-D Microfablication Process by Double Exposure Method in Standard X-ray Lithography”, 2004 Memoirs of the SR Center Ritsumeikan University, Ritsumeikan University, April, 2004, pp.93-101.