The 33rd IEEE International Conference on Micro Electro Mechanical Systems (IEEE MEMS 2020) will be held in Vancouver, British Columbia, from January 18 – 22, 2020. From our group, three abstracts (including co-author papers) have been accepted.
A PLANAR SINGLE-ACTUATOR BI-STABLE MECHANICAL LATCH AS AN ELECTRICAL SWITCH
Yang Bu, Yue Jiang, Saeko Kawano, Brian S.T. Tam, Sheng Ni, Liying Lin, Osamu Tabata, Toshiyuki Tsuchiya, Xiaohong Wang, and Man Wong
SINGLE-CRYSTAL LITHIUM NIOBATE PIEZOELECTRIC DISK GYROSCOPE
Kazutaka Obitani, Toshiyuki Tsuchiya, Kazutaka Araya, and Masanori Yachi
ELECTROSTATIC MICRO MIRROR ARRAY WITH BATCH-FABRICATED TORSION BEAM OF SILICON NANOWIRE
Tomoya Nakamura, Yoshikazu Hirai, Osamu Tabata, and Toshiyuki Tsuchiya