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Nano/Micro System Laboratory

Department of Micro Engineering, Kyoto University

京都大学大学院工学研究科マイクロエンジニアリング専攻

ナノシステム創成工学講座 ナノ・マイクロシステム工学分野

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Research Topics

Tensile strength evaluation of free-standing silicon nanowire integrated to ...

  Silicon nanowire […]


MEMS fabricated conformal electrodes for thermotunneling cooling

A microelectromech […]


10×10 capacitive accelerometer array

Capacitive acceler […]


Electromagnetic-driven deformable mirror device

Adaptive optics (A […]



Micro fluidic system for drug testing

In the process of […]


Lithography of composite material

Composite material […]


Electrostatic deformable mirror with moving substrate

Inspection light o […]


CNT fixation on DNA origami using linker

DNA origami work b […]



Purification of DNA nanostructure based on microfluidic device

For effective usag […]


Time-resolved Raman stress measurement

In this research, […]


A sub-micron-gap SOI capacitive accelerometer array utilizing size effect

MEMS capacitive ac […]


High-temperature mechanical property of single crystal silicon microstructures

Understanding of h […]



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Nano/Micro System Engineering Laboratory
Department of Micro Engineering, Kyoto University
Kyoto Daigaku-Katsura C3, Nishikyo-ku, Kyoto 615-8540, JAPAN
TEL:075-383-3693 / FAX:075-383-3738 / E-mail

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