The 32nd International Microprocesses and Nanotechnology Conference (MNC2019) will be held from 28-31 October 2019 in Hiroshima, Japan. From our group, one abstract has been accepted.
Microsystem Technology and MEMS
31P-8-26
A. Banerjee, Y. Hirai, T. Tsuchiya and O. Tabata
Vacuum Emission in MEMS Fracture Fabricated, Gap-Controlled Si Nano Electrodes