IEEE MEMS 2019 (HP) will be held in Seoul, Korea, from 27-31 January 2019. From Tabata Lab., one abstracr has been accepted.
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Katsuo Nakamura, Yuichi Kimoto, Yoshikazu Hirai, Toshiyuki Tsuchiya, and Osamu Tabata
MICROFABRICATION OF ALKALI VAPOR CELLS WITH LOWER THE OUTGASSING AND TEMPERATURE UTILIZING SILICON 3D STRUCTURE