MEMS Deformable Mirror Actuated By Electrostatic Piston Array

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Deformable mirror is used for compensating aberrations caused by eye distortion. We propose and develop new type of DM, which adopts the structure of “electrostatic piston array”.　We tackle this new DM with both direction of fabricating process and mathematical model.

[Applications]

  • 　Apparatus for medical diagnosis

[Publications]

  • Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu TabataMEMS
    Deformable Mirror Actuated By Electrostatic Piston Array
    The 2016 International Conference on Optical MEMS and Nanophotonics (OMN 2016), Singapore (31 July-4 August, 2016), pp.55-56