Resonant fatigue testing of single-crystal silicon torsional micromirror

Torsional micromirrors are the MEMS devices which have mirrors supported by torsional beams. The mirror devices can scan three-dimensional space by oscillating in torsional mode and reflecting laser beams, and they are expected to be applied to projectors and LiDARs and so on. Therefore, it will be more important to investigate the reliability of the torsional beams. In this research, I construct a torsional mode fatigue testing system for MEMS mirrors. Furthermore, I design and fabricate some mirror devices from SOI wafers, and carry out resonant fatigue testing.


  • Micro projector
  • LiDAR (Light detection and ranging)