Dynamic Stress Measurement of Silicon

MEMS are often used in various products under vibrating environment. In order to improve the reliability of such products, it is important to measure the dynamic stress of MEMS under vibration. In this research, we try to fabricate and evaluate a MEMS optical chopper which modulates the incident laser of the Raman spectrometer for the purpose of the local dynamic stress measurement of single crystalline silicon resonator using time-resolved Raman spectroscopy.

【Applications】

  • 　Mechanism of fracture by vibration
  • 　Design of MEMS resonator

2014年10月1日Actuators,Micromaterial,ResearchSilicon