Nanogap device for thermionic generation
Devices and an external mechanism capable of nanogap formation, measurement of gap distance and curr ...
Nanogap device for thermal generation
Vacuum nanogaps are expected as small-sized, high-efficiency thermoelectric devices due to their hig ...
Fabrication process effect on torsional strength of SCS beam for resonant mirror devices
There are two types of fabrication processes for MEMS torsional mirror device. One is the process us ...
Parallel tensile testing device with integrated shear strain gauge for single crystal silicon micro structure
In order to shorten testing time on tensile-mode fatigue testing of single crystal silicon micro str ...
Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
A geometrical compensation design method in (100) single crystal silicon (SCS) vibrating ring gyrosc ...
Thermal properties evaluation of SOI-MEMS based nanogap with cleavage plane for thermionic generation
Thermionic generation generates electricity by collecting thermionic electrons emitted from the high ...
MEMS fabricated nanogap electrodes
We have developed a microelectromechanical system (MEMS) to fabricate large area nanogap electrodes. ...
Development of ionic liquid electrospray thruster
We are developing thruster to be mounted on nanosatellite. Electrospray thruster gains thrust by exh ...