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Nano/Micro System Laboratory

Department of Micro Engineering, Kyoto University

京都大学大学院工学研究科マイクロエンジニアリング専攻

ナノシステム創成工学講座 ナノ・マイクロシステム工学分野

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Research Topics

Tensile testing of silicon at high temperature

Structural materia […]


Reliability evaluation of silicon microstructure

Silicon is a widel […]


Electrostatic-driven deformable mirror device

Adaptive optics (A […]


Microfluidic system for medical diagnosis

In medical field, […]



MEMS Tensile testing of Integrated Si Nanowire

Siナノワイヤは機械的・電気的特性に […]


Acceleration sensitivity of tuning fork gyroscope

We investigated th […]


Self-assembling of DNA Origami with Ultrasonic Vibration

Self-assembling of […]


Dynamic Stress Measurement in MEMS Structures using Micro Raman Spectroscopy

The aim of this re […]



Developing MEMS Tuning fork gyroscope with low acceleration sensitivity

MEMS technology pr […]


Fabrication of Nano-Gap Electrode using Gold Nano-Rod Growth on Substrate

Nanogap electrodes […]


Tensile Testing for Carbon Nanotube using Electrostatic MEMS

   We are developi […]


Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at ...

MEMS (Micro Electr […]



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Nano/Micro System Engineering Laboratory
Department of Micro Engineering, Kyoto University
Kyoto Daigaku-Katsura C3, Nishikyo-ku, Kyoto 615-8540, JAPAN
TEL:075-383-3693 / FAX:075-383-3738 / E-mail

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