The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST 2013: http://www.harmnst2013.org/) will be held in Berlin, Germany on April 21-24, 2013. This conference is an international workshop on high aspect ratio micro and nano patterning technologies additional focused on materials, tools and applications..
One abstract from Tabata lab. collaborated with TU Delft was accepted by the technical program committee for the presentation.
Authors and title of the papers are:
Y. Kato, Y. Hirai, F. van Kempen, F. van Keulen, K. Sugano, T. Tsuchiya, O. Tabata
Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography