The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013: http://www.mems2013.org/index.html) will be held in Taipei, Taiwan on January 20-24, 2013 at the Taipei International Convention Center (TICC). This conference is one of the premier annual events reporting research results on every aspect of microsystems technology.
Two abstracts from Tabata lab. were accepted by the technical program committee for the presentation.
Authors and title of the papers are:
Authors and title of the papers are:
【Fabrication Technologies】
DNA ORIGAMI ASSEMBLY ON PATTERNED SILICON BY AFM BASED LITHOGRAPHY
T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata
【Micro-Actuators】
ROTATIONAL MOTION EFFECT ON SENSITIVITY MATRIX OF MEMS THREE-AXIS ACCELEROMETER FOR REALIZATION OF CONCURRENT CALIBRATION USING VIBRATION TABLE
A. Nakano, Y. Hirai, K Sugano, T. Tsuchiya, O. Tabata, A. Umeda
