MME 2015 (http://mme2015.manucodiata.org/), which covers the areas of materials, processing technology and devices, will be held in Toledo, Spain, from September 20 to 23, 2015. From Tabata Lab., 1 abstract was accepted by the technical program committee.
B6
Batch Integration Process of a Free-Standing Silicon Nanowire to MEMS
Tetsuya Hemmi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata