IEEE MEMS 2012 (www.mems2012.org) will be held in Paris, France on 29 January – 2 February 2012 at Marriott Paris Rive Gauche Hotel. From Tabata Lab. 2 abstracts were accepted by the technical program committee for the poster presentation.
【Materials and Device Characterization (59-Th)】
T. Tsuchiya, O. Tabata, and A. Umeda
Dynamic Sensitivity Matrix Measurement for Single-Mass SOI 3-axis Accelerometer
【Energy and Power MEMS (258-M)】
A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, and T. Tsuchiya
Are Nonlinear Resonators Suitable for Energy Harvesting? -Equivalent Circuit Analysis of Nonlinear Response of MEMS Resonator
