The 2011 MRS Fall Meeting (www.mrs.org/fall2011/) will be held in Boston MA on November 28 – December 2, 2011 at the Hynes Convention Center. 1 abstract from Tabata lab. was accepted by the technical program committee for the presentation.
【Symposium TT: Microelectromechanical Systems—Materials and Devices V】
H. Yagyu, Y. Hirai, A. Uesugi, Y. Makino, K. Sugano, T. Tsuchiya and O. Tabata
Coarse-Grained Molecular Dynamics Simulation of Epoxy-Based Chemically-Amplified Resist for MEMS Application