Journal of Micromechanics and Microengineering Highlights of 2008
産総研の池原氏と土屋准教授の共著論文 High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned s […]
産総研の池原氏と土屋准教授の共著論文 High-cycle fatigue of micromachined single-crystal silicon measured using high-resolution patterned s […]
