国際会議

Journal / Int. Conf. / Dom. Meeting / Thesis

2025202420232022202120202019201820172016201520142013201220112010200920082007200620052004-2003

2025

  1. Kosuke Shima, Hiroki Takemura, Masaki Shimofuri, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
    Improved Learning Performance in Physical Reservoir Computing using Coupled Triple MEMS Nonlinear Resonators
    The 38th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2025), Kaoshiung, Taiwan, (January 22-26, 2025),

2024

  1. Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
    Exploring Surface Acoustic Wave Devices for Sound-Based Reservoir Computing
    The 37th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2024), Austin, TX, (January 21-25, 2024), pp. 529-532.
    DOI: 10.1109/MEMS58180.2024.10439559
  2. Kenji Morita, Toshiyuki Tsuchiya, Kazutaka Araya, Tsunehiko Imamura, Masanori Yachi
    Single Crystal Lithium Niobate Cylindrical Resonator for High-Performance Miniature Piezoelectric Gyroscope
    The 11th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2024), Hiroshima, JAPAN, March 25-28, 2024, pp.1-4.
    DOI: 10.1109/INERTIAL60399.2024.10502044
  3. Ayumu Takahashi, Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Theoretical Analysis of (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs
    The 11th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2024), Hiroshima, JAPAN, March 25-28, 2024, pp.1-4.
    DOI: 10.1109/INERTIAL60399.2024.10502107
  4. Wei Yu, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
    Synergistic Effects of Thermal and Electrostatic Resonance Frequency Tuning in Ultrathin Silicon Nanomechanical Resonators
    The 11th Asia-Pacific Conference of Transducers and MIcro-Nano Technology (APCOT 2024), Singapore, June 23-26, 2024. OR-09-1115.
  5. Masaki Shimofuri, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
    Nanometer-Order Stable Separation Control of Nanogaps with (111) Silicon Cleavage Planes in Vacuum
    The 11th Asia-Pacific Conference of Transducers and MIcro-Nano Technology (APCOT 2024), Singapore, June 23-26, 2024. OR-16-0129-R
  6. Shun-ichiro Matsuda, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Scalable fabrication of diamond MEMS devices from commercial diamond-on-insulator wafers
    50th international conference on Micro and Nano Engineering (MNE2024), Montpellier, France, Sep. 16-19, 2024, T2Session1.
  7. Taiki Ijima, Claude Meffen, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Development of a Thermal SAW Phase Modulator for Physical Reservoir Computing
    2024 IEEE Ultrasonics, Ferroelectrics, and Frequency Control Joint Symposium, Taipei, TAIWAN, Sep. 22-26, 2024, 8033.
  8. Toshiyuki Tsuchiya
    INVITED: Toward Sound-Based Reservoir Computing using Surface Acoustic Wave Devices
    2024 IEEE IRDS and International Nanodevices and Computing Conference (INC), online, Sep. 25-26, 2024.
  9. Y. Ikeda, Y. Akura, M. Shimofuri, A. Banerjee, T. Tsuchiya, and J. Hirotani
    Estimation of Thermal Conductivity Profile in Depth Direction Using Machine Learning in Frequency Domain Thermoreflectance
    The 34th International Symposium on Transport Phenomena (ISTP-34) (Taoyuan Convention and Exhibition Center, Taoyuan, Taiwan, Nov. 10-14, 2024.
  10. R. Yamasaki, Y. Matsunaga, M. Shimofuri, A. Banerjee, T. Tsuchiya, and J. Hirotani
    Flexible Three-Omega Sensors Fabricated on Parylene Substrates
    The 34th International Symposium on Transport Phenomena (ISTP-34) (Taoyuan Convention and Exhibition Center, Taoyuan, Taiwan, Nov. 10-14, 2024.
  11. Ayumu Takahashi, Amit BanerJee, Jun Hirotani and Toshiyuki Tsuchiya, Kyoto Univ., Japan
    (100) silicon ring gyroscope with rectangle springs aiming at frequency and thermoelastic Qfactor matching
    37th International Microprocesses and Nanotechnology Conference (MNC 2024), Kyoto, Japan, Nov. 12-15, 2024, 15P-1-48
  12. Taichi Murakami, Masaki Sshimofuri, Toshiyuki Tsuchiya, Shugo Miyake
    Noncontact measurement of TiNi film surface temperature using laser reflected light
    37th International Microprocesses and Nanotechnology Conference (MNC 2024), Kyoto, Japan, Nov. 12-15, 2024, 15P-1-51
  13. Yuki Akura, Yuki Matsunaga, Hiroya Morotomi, Masaki Shimofuri, Amit Banerjee Toshiyuki Tsuchiya, Jun Hirotani
    Thermal Conductivity of Ti3C2Tx MXene Thin Film Measured by Frequencydomain Thermoreflectance
    37th International Microprocesses and Nanotechnology Conference (MNC 2024), Kyoto, Japan, Nov. 12-15, 2024, 14P-1-25
  14. Shuto Kawaguchi, Yu Wei, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
    Tunable Si NEMS resonators for frequency-domain physical reservoir computing
    37th International Microprocesses and Nanotechnology Conference (MNC 2024), Kyoto, Japan, Nov. 12-15, 2024, 14P-1-43
  15. Taiki Ijima, Claude Meffan, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
    Nonlinear thermo-acoustic phase modulator for physical reservoir computing
    37th International Microprocesses and Nanotechnology Conference (MNC 2024), Kyoto, Japan, Nov. 12-15, 2024, 15B-3-1
  16. Shunichiro Matsuda, Amit Banerjee, Masaki Shimofuri, Jun Hirotani, Toshiyuki Tsuchiya
    Fabrication and resonant characteristics of diamond MEMS resonators
    37th International Microprocesses and Nanotechnology Conference (MNC 2024), Kyoto, Japan, Nov. 12-15, 2024, 15B-3-5.
  17. Shuto Kawaguchi, Amit banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
    MEMS resonator-based reservoir computing for epileptic seizure prediction
    The 2024 International Meeting for Future of Electron Devices, Kansai (IMFEDK 2024), Ryukoku Univ., Kyoto, Japan, Nov. 21-22, 2024, R01
  18. Yuki Akura, Yuki Matsunaga, Hiroya Morotomi, Masaki Shimofuri, Amit Banerjee, Toshiyuki Tsuchiya, Jun Hirotani
    Thermal Conductivity Measurement of Ti3C2Tx MXene Thin Film Using Frequency-Domain Thermoreflectance
    2024 MRS Fall Meeting & Exhibit (Boston, MA), Dec. 1-6, 2024, SB06.05.10

2023

  1. Hiroki Takemura, Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
    Physical Resevoir Computing using Nonlinear MEMS Resonator Having High Memory Capacity at “Edge of Chaos"
    The 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023), Munich, Germany, (January 15-19, 2023), pp. 515-519.
    DOI: 10.1109/MEMS49605.2023.10052286
  2. Akane Nishimura, Yoshinori Takao, and Toshiyuki Tsuchiya
    Ionic Liquid Electrospray Thruster with Two-Stage Electrodes on Glass Substrate
    The 36th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2023), Munich, Germany, (January 15-19, 2023), pp. 681-684.
    DOI: 10.1109/MEMS49605.2023.10052351
  3. Shuya Okayama, Amit Banerjee, Jun Hirotani and Toshiyuki Tsuchiya
    A New Design of Mode-Matched (100) Silicon Ring Gyroscope with Chamfered Rectangle Springs Immune to Fabrication Error
    2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL), Lihue, HI, USA, (March 28-31, 2023), A2L-A-3
    DOI: 10.1109/INERTIAL56358.2023.10103986
  4. Jiacheng Liu, Yuma Ohara, Zerui Xu, Ruizi Liu, Zhangshanhao Li, Xiaohong Wang, Toshiyuki Tsuchiya, and Man Wong
    Micro-Fabricated Bi-Stable Mechanical Switch Actuated by Single Thermal Actuator
    The 22nd International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’23), Kyoto, Japan, (June 25-29, 2023), pp.869-872.
    [abstract]
  5. Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, and Toshiyuki Tsuchiya
    Human Activity Recognition using Intelligent Resonant Accelerometer Employing MEMS Reservoir Computing
    The 22nd International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’23), Kyoto, Japan, (June 25-29, 2023), pp. 1664-7.
    [abstract]
  6. Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Optimisation of a physical reservoir computer’s parameters using a genetic algorithm
    Deep learning meets Neuromorphic Hardware (a Workshop of European Conference on Machine Learning and Principles and Practice of Knowledge Discovery in Databases), Turin, Italy, (Sep. 18, 2023), 101.
  7. Taiki Ijima, Claude Meffan, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Development of surface acoustic wave phase modulators for physical reservoir computing
    The 49th International Conference on Micro & Nano Engineering (MNE 2023), Berlin, Germany (Sep. 25-28, 2023), pp. 417-418.
  8. Haruki Goda, Naoyuki Ishida, Kozo Furuta, Kazuhiro Izui, Fred van Keulen, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata, Yoshikazu Hirai
    Electrode Design Using Multi-Material Topology Optimization for Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
    The 49th International Conference on Micro & Nano Engineering (MNE 2023), Berlin, Germany (Sep. 25-28, 2023), pp. 661-662.
  9. Mikiya Oki, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Synchronous vibration of 1×2 torsional micromirror array
    The 49th International Conference on Micro & Nano Engineering (MNE 2023), Berlin, Germany (Sep. 25-28, 2023), pp. 781-782.
  10. Amit Banerjee, Wei Yu, Jun Hirotani, Toshiyuki Tsuchiya
    Ultrathin Si nanostring resonators with widely tunable dynamic behaviour
    The 49th International Conference on Micro & Nano Engineering (MNE 2023), Berlin, Germany (Sep. 25-28, 2023). pp. 773-774.
  11. Claude Meffan, Taiki Ijima, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Optimisation of a physical reservoir computer’s parameters using a genetic algorithm non-linear search
    The 49th International Conference on Micro & Nano Engineering (MNE 2023), Berlin, Germany (Sep. 25-28, 2023), pp. 726-727
  12. Amit Banerjee, Shuto Kawaguchi, Claude Meffan, Jun Hirotani, Toshiyuki Tsuchiya
    Developing a MEMS reservoir-computer for real-time epileptic seizure detection
    36th International Microprocesses and Nanotechnology Conference (MNC 2023), Sapporo, Japan, (Nov. 14-17, 2023), 16P-1-87.
  13. Wei Yu, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Developing Effective Si Nanoresonator Devices for Ultrasensitive Gas Sensing
    36th International Microprocesses and Nanotechnology Conference (MNC 2023), Sapporo, Japan, (Nov. 14-17, 2023), 17B-2-1,

2022

  1. Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
    Observation of Pull-In by Casimir Force in MEMS-Controlled Nanogap Fabricated by Silicon Cleavage
    The 35th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2022), Tokyo, (January 9-13, 2022), pp. 511-514.
    DOI: 10.1109/MEMS51670.2022.9699645
  2. Takahirio Mizumoto, Yoshikazu Hirai, Amit Banerjee, and Toshiyuki Tsuchiya
    MEMS Reservoir Computing using Frequency Modulated Accelerometer
    The 35th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2022), Tokyo, (January 9-13, 2022), pp. 487-490.
    DOI: 10.1109/MEMS51670.2022.9699777
  3. Akane Nishimura, Yoshinori Takao, Toshiyuki Tsuchiya
    Design and fabrication of ionic liquid electrospray thruster with two-stage electrodes
    The 33rd International Symposium on Space Technology and Science (ISTS 2022), Beppu, Japan, Online, (Feb, 28 – Mar. 4, 2022), 2022-b-28.
  4. Wei Yu, Amit Banerjee, Yoshikazu Hirai, Jun Hirotani, Toshiyuki Tsuchiya.
    Ultrathin Si NEMS Resonators for Gas Sensing with Ultrahigh Sensitivity
    2022 IEEE 17th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS), 14-17 April 2022 (Virtual Conference), T2.3.2
  5. Masaaki Tsukamoto, Hirokazu Terai, Madoka Tsumaya, Shigeru Kurosawa, Osamu Tsuji, Masashi Satou, Yoshiyuki Inoue, Keiko Kawano, Tomoaki Matsushima, Toshiyuki Tsuchiya
    Fluid Leak Detector for Cyclo-Olefin Polymer Microchannels Using Low-Temperature Bonding by Water Vapor Plasma
    2022 MRS Spring Meeting (Honolulu, HI), May 5-13, 2022, MF01.07.01.
  6. [Plenary] Toshiyuki Tsuchiya
    MEMS Resevoir Computing -Sensors Become More Intelligent-
    The 10th Asia-Pacific Conference of Transducers and MIcro-Nano Technology (APCOT 2022), Online, May 29- June 1, 2022. Session 1.
  7. S. Xie, R. Liu, S. Okayama, T. Tsuchiya, M. Wong and X. Wang
    A Planar Single-Actuator Bi-Stable Mechanical/Electrical Switch
    ACTUATOR 2022; International Conference and Exhibition on New Actuator Systems and Applications, June 29-30 2022, B4-5.
    [abstract]
  8. Yuki Akura, Masaki Shimofuri, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Characterization of gap-distance dependency on field emission at nanogap between silicon cleavage surfaces by numerical calculations
    2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022), Nagoya, Japan, Aug. 28-31, 2022, C1-3-04.
  9. Wei Yu, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Fabrication and Dynamic Characterization of Ultrathin Si NEMS Resonators
    2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022), Nagoya, Japan, Aug. 28-31, 2022, C1-3-05.
  10. Claude Meffan, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    A non-linear SAW resonator as a reservoir computing node
    2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022), Nagoya, Japan, Aug. 28-31, 2022, A2-2-03.
  11. Yuanlin Xia, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Alternating a-C:H Coating Effect on Torsional Strength of Silicon Beam for Micromirrors
    2022 JSME-IIP/ASME-ISPS Joint Conference on Micromechatronics for Information and Precision Equipment (MIPE 2022), Nagoya, Japan, Aug. 28-31, 2022, C2-2-04.
  12. Takahiro Mizumoto, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Neuroaccelerometer using reservoir computing with parametric nonlinear response
    The 48th International Conference on Micro & Nano Engineering (MNE) and Eurosensors 2022, Leuven, Belgium (Sep. 19-23, 2022), T3-P1-TuA-047.
  13. Shuya Okayama, Amit Banerjee, Jun Hirotani, Toshiyuki Tsuchiya
    Mode-matched (100) single crystal silicon ring gyroscope robust to fabrication errors
    The 48th International Conference on Micro & Nano Engineering (MNE) and Eurosensors 2022, Leuven, Belgium (Sep. 19-23, 2022), T2-F-WeA
  14. Yuki Matsunaga, Jun Hirotani, Haruka Omachi
    Highly temperature-tolerant p-type carbon nanotube transistor doped with 1,4,5,8,9,11-
    hexaazatriphenylenehexacarbonitrile
    35th International Microprocesses and Nanotechnology Conference (MNC 2022), Tokushima, Japan (Nov. 8-11, 2022), 10B-3-4.
  15. Yuki Shibata, Emi Saita, Masaki Iwata, Yuki Matsunaga, Rie Suizu, Kunio Awaga, Jun Hirotani and Haruka Omachi
    Exfoliation of Al-residual Ti3C2Tx MXene by using tetramethylammonium bases and conductive film applications
    35th International Microprocesses and Nanotechnology Conference (MNC 2022), Tokushima, Japan (Nov. 8-11, 2022), 10P-1-2.

2021

  1. Takashi Miyazaki, Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Highly Accurate Measurement of Trans-Epithelial Electrical Resistance in Organ-on-a-Chip
    The 34th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2021), Online, (January 25-29, 2021), pp. 411-414.
    [abstract]
  2. Zehua Lan, Qi Tao, Zili Tang, Toshiyuki Tsuchiya, Man Wong, and Xiaohong Wang
    A Planar Single-Actuator Bo-Stable Switch Based on Hookless Mechanism
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’21), Online (June 20-25, 2021), pp. 128-131.
    [abstract]
  3. Jiandong Yang, Satoshi Imamura, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, and Osamu Tabata
    Multilayered Microfluidic Device for Controllable Flow Perfusion of Gut-Liver on a Chip
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’21), Online (June 20-25, 2021), pp. 176-179.
    [abstract]
  4. Toshiyuki Tsuchiya, Toshiki Ema, Yoshikazu Hirai, Christopher Welham Hideyuki Maekoba
    Gravity and Film Stress Analysisfor MEMS Deformable MIrror with Electrostatic Piston Array
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’12), Online (June 20-25, 2021), pp. 483-486.
    [abstract]
  5. Zili Tang, Qi Tao, Zehua Lan, Zong Liu, Toshiyuki Tsuchiya, Xiaohong Wang, and Man Wong
    High Durability Latch-Lock Bi-Stable Switch on Y-Shaped Cantilever
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’21), Online (June 20-25, 2021), pp. 675-678.
    [abstract]
  6. Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, and Toshiyuki Tsuchiya (Just-in-Session)
    Microfabricated Alkali Metal Vapor Cells Filled with an On-Chip Dispensing Component
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’21), Online (June 20-25, 2021), B6-JI1A1
  7. {TUTORIAL] Toshiyuki Tsuchiya
    Fabrication of Cyclo-Olefin Polymer-Based Microfluidic Device using Water Vapor Plasma Activated Bonding
    The 21st International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’21), Online (June 20-25, 2021), SC1-2T1.
  8. [INVITED] Toshiyuki Tsuchiya
    Wineglass mode MEMS gyroscope with single crystal materials
    The 47th International Conference on Micro and Nano Engineering (MNE2021), Turin, Italy (Sept. 20-23, 2021).
  9. Masaki Shimofuri, Yoshikazu Hirai, Amit Banerjee and Toshiyuki Tsuchiya
    SOI-MEMS device for fabrication and physical properties measurement of single-crystal silicon nanogap with (111) cleavage plane surfaces
    34th International Microprocesses and Nanotechnology Conference (MNC 2021), Online (Oct. 26-29, 2021), 29C-3-1.

2020

  1. Yang Bu, Yue Jiang, Saeko Kawano, Brian S.T. Tam, Sheng Ni, Liying Lin, Osamu Tabata, Toshiyuki Tsuchiya, Xiaohong Wang, and Man Wong
    A Planer Single-Actuator Bi-Stable Mechanical Latch as an Electrical Switch
    The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), Vancouver, BC, Canada, (January 18-22, 2020), pp. 493-496.
    [abstract]
  2. Kazutaka Obitani, Toshiyuki Tsuchiya, Kazutaka Araya, Masanori Yachi
    Single-Crystal Lithium Niobate Piezoelectric Disk Gyroscope
    The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), Vancouver, BC, Canada, (January 18-22, 2020), pp. 781-784.
    [abstract]
  3. Tomoya Nakamura, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Electrostatic Micro Mirror Array with Batch-Fabricated Torsion Beam of Silicon Nanowire
    The 33rd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2020), Vancouver, BC, Canada, (January 18-22, 2020), pp. 1157-1160.
    [abstract]
  4. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Scale-Factor Analysis of a Geometrically Compensated (100) Single-Crystal Silicon Vibratory Ring Gyroscope
    The 7th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL 2020), Hiroshima, Japan, (March 23-26, 2020), accepted.
    [abstract]
  5. Kazutaka Obitani, Jin Qian, Kazutaka Araya, Masanori Yachi, Toshiyuki Tsuchiya
    Electrode Design of Single Crystal Lithium Niobate Piezoelectric Disk Gyroscope
    The 7th IEEE International Symposium on Inertial Sensors and Systems (INERTIAL 2020), Hiroshima, Japan, (March 23-26, 2020), accepted.
    [abstract]
  6. Dongxiao Zhang, Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata, Toshiyuki Tsuchiya
    Heart-Liver on a Chip Integrated with a Microelectrode Array to Monitor Extracellular Field Potentials of Cardiomyocytes
    The 24th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2020), Online (October 4-9, 2020), pp.941-942.
  7. Shun Kiyose, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Microfabricated vapor cells with monolithically integrated alkali metal dispensing component
    The 33rd International Microprocesses and Nanotechnology Conference (MNC2020), Online (Nobember 9-12, 2020), 2020-5-8.
  8. Yuanlin Xia, Yoshikazu Hirai, Toshiyuki Tsuchiya
    Tensile strength of single-crystal silicon microstructure with stepwise bias-graded a-C:H coating
    The 33rd International Microprocesses and Nanotechnology Conference (MNC2020), Online (Nobember 9-12, 2020), 2020-5-22.
  9. Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Marika Trumm, Toshiyuki Tsuchiya, Osamu Tabata
    In Vitro Modeling of Non-Alcoholic Fatty Liver Disease by IntegratedGut-Liver on a Chip
    The 2020 MRS Spring/Fall Meeting and Exhibit, Online (2020), S.SM01.02.02.

2019

  1. Katsuo Nakamura, Yuichi Kimoto, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Alkali Vapor Cells with Lower the Outgassing and Temperature Utilizing Silicon 3D Structure
    The 32nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2019), Seoul, Korea, (January 27-31, 2019), pp.350-353.
    [abstract]
  2. Naoki Yamashita, Seongsu Park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Surface-Enhanced Raman Spectroscopy with Gold Nanoparticle Dimers Created by Sacrificial DNA Origami Technique
    The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April 11-14, 2019), pp.322-323.
  3. Yusuke Tsuji, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Characterization of Ionic Liquid-Based Pressure Sensor Fabricated by Grayscale Lithography
    The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April 11-14, 2019), pp.409-411.
  4. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Optimization of Suspending Beams for Modematching of (100) Single-Crystal Silicon Vibratory Ring Gyroscope
    The 14th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2019), Bangkok, Thailand (April 11-14, 2019), SuPo1.11.
  5. Ikkei Yamauchi, Tomoki Tabuchi, Yoshikazu Hirai, Masayuki Iwamoto, Toshiyuki Tsuchiya, Hirofumi Shimizu, Osamu Tabata
    Microfabricated Solution Chamber for High Resolution Diffracted X-ray Tracking Method to Observe Ion-Channel Gating Motions
    The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’19), Berlin, Germany (June 23-27, 2019), pp.25-28.
    [abstract]
  6. Kentaro Kawai, Keita Hara, Ryota Nakamura, Kenta Arima, Kazuya Yamamura, Osamu Tabata
    Rapid Assembly of DNA Origami in Microfluidic Temperature Gradient
    The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’19), Berlin, Germany (June 23-27, 2019), pp.398-401.
    [abstract]
  7. Yang Gao, Toshiki Ema, Zeyuan Cao, Sheng Ni, Yin L.E. Chan, Osamu Tabata, Toshiyuki Tsuchiya, Xiaohong Wang, Man Wong
    A Planar Single-Actuator Bi-Stable Switch Based on Latch-Lock Mechanism
    The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’19), Berlin, Germany (June 23-27, 2019), pp.705-708.
    [abstract]
  8. Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Temperature Difference Measurement Across MEMS Based Nanogap Created by Cleavage of Silicon for Thermionic Generation
    The 20th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’19), Berlin, Germany (June 23-27, 2019), pp.1483-1486.
    [abstract]
  9. Yuki Yamazaki, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Parallel Tensile-mode Testing of Single Crystal Silicon By Specimen Integrating Shear Strain Gauge
    The 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece (September 23-26, 2019), PC133.
  10. Kazutaka Obitani, Toshiyuki Tsuchiya, Kazutaka Araya, Masanori Yachi
    Mode-Matched Single-Crystal Lithium Niobate Disk Resonator for High-Performance Gyroscope
    The 45th International Conference on Micro & Nano Engineering (MNE2019), Rhodes, Greece (September 23-26, 2019), PC67.
  11. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Vacuum Emission in MEMS Fracture Fabricated, Gap-Controlled Si Nano Electrodes
    The 32nd International Microprocesses and Nanotechnology Conference (MNC 2019), Hiroshima, Japan (October 28-31, 2019), 31P-8-26.
  12. Jiandong Yang, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Gut-Liver on a Chip for Modelling Non-Alcoholic Fatty Liver Disease in vitro
    The 23rd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2019), Basel, Switzerland (October 27-31 2019), pp.376-377.

2018

  1. Yoshikazu Hirai, Yusuke Tsuji, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Improved Sensitivity of Ionic Liquid-Based Pressure Sensor for Body-on-a-Chip using Simulation-Based 3D Lithography
    The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, Northern Ireland, (January 21-25, 2018), pp. 511-514.
    [abstract]
  2. Akiko Uno, Yoshikazu Hirai, Osamu Tabata, Toshiyuki Tsuchiya
    Zernike Generation with MEMS Deformable Mirror Actuated by Electrostatic Piston Array
    The 31st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2018), Belfast, Northern Ireland, (January 21-25, 2018), pp. 704-711.
    [abstract]
  3. Yunyi Shu, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Geometrical compensation of (100) single-crystal silicon mode-matched vibratory ring gyroscope
    The 5th IEEE International Symposium on Inertial Sensors & Systems (INERTIAL 2018), Lake Como, Italy, March 26-29, 2018, P1-15.
    [abstract]
  4. (Invited) Toshiyuki Tsuchiya
    Field Electron Emission Across Fracture Fabricated Large-Area Nanogap on MEMS
    The 13th Annual IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2018), Singapore, Aplil 22-26, 2018.
  5. Toshiyuki Tsuchiya
    Measurement of energy carrier transportation across fracture fabricated nanogap on MEMS
    Emerging Technologies 2018, Whistler, Canada, May 9-11, 2018, B1-4.
  6. Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
    Alkali Metal Dispenser Utilizing Scalloped Silicon Groove for Microfabricated Vapor Cells
    2018 IEEE International Frequency Control Symposium (IFCS 2018), Olympic Valley, CA, USA, May 22-24, 2018, ThP27.
    [abstract]
  7. Yoshikazu Hirai, Katsuo Nakamura, Yuichi Kimoto, Toshiyuki Tsuchiya, Osamu Tabata
    Low-Temperature Alkali Metal Production Utilizing Scalloped Silicon Grooves for Microfabricated Alkali Vapor Cells
    Asia-Pacific Conference of Transducers and Micro-Nano Technology 2018 (APCOT 2018), Hong Kong SAR, June 24-27, 2018, 94.
  8. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Vacuum Emission in Large-Area Nanogap Fabricated by MEMS Controlled Cleavage of Single Crystal Silicon
    The 31st International Vacuum Nanoelectronics Conference (IVNC 2018), Kyoto, Japan, July 9-13, 2018, O9-2.
    [abstract]
  9. Yoshikazu Hirai, Yasuaki Mori, Tomoki Tabuchi, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
    Microchannel Fabrication using a Photo Patternable Adhesive Material for Recording Conformational Changes of KcsA Channel with the Diffracted X-ray Tracking Method
    The EUROSENSORS 2018, Graz, Austria, September 9-12, 2018, P45.
    [abstract]
  10. Jiaxu Wu, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Fluidic-Capacitor Integrated Microfluidic Platform to Mimic Heart Beating for Generation of Functional Liver Organoids
    The 22nd International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2018), Kaohsiung, Taiwan, November 11-15, 2018, pp.1718-1721.
  11. Shu Yunyi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Geometrical Compensation for Mode-Matching of (100) Silicon Ring Resonator for Vibratory Gyroscope
    The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan, November 13-16, 2018, 14B-3-1.
  12. Wenlei Zhang, Kazutaka Obitani, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Fracture Strength of a Silicon Torsional Mirror Resonator Fully Coated with Submicrometer-Thick PECVD DLC Film
    The 31st International Microprocesses and Nanotechnology Conference (MNC 2018), Sapporo, Japan, November 13-16, 2018, 15D-4-3.
  13. Masaki Shimofuri, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Non-Contact Temperature Difference Measurement of Cleavage Plane Nanogap Electrodes with Large Surface Area
    The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA, November 25-30, 2018, TP02.07.04.
  14. Yusuke Tsuji, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Improvement Performance of Ionic Liquid-Based Pressure Sensor for Integration Into Body-on-a-Chip
    The 2018 MRS Fall Meeting and Exhibit, Boston, MA USA, November 25-30, 2018, BM05.06.03.

2017

  1. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Properties of Single-Crystal-Silicon Fully Coated with Submicrometer-Thick PECVD DLC
    The 30th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2017), Las Vegas, NV, USA, (January 22-26, 2017), W-099, pp.732-735.
    [abstract]
  2. (Invited) Yoshikazu Hirai, Ken-ichiro Kamei, Osamu Tabata
    Body-on-a-Chip: an application of 3-D microstructuring techniques
    The 9th International Symposium on Advanced Plasma Science and its Application for Nitrides and Nanomaterials / The 10th International Conference on Plasma-Nano Technology & Science (ISPlasma 2017 /IC-PLANTS 2017), Nagoya, Japan, (March 2-5, 2017).
  3. (Invited) Ken-ichiro Kamei, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Heart/Cancer on a Chip: Towards Recapitulation of Side Effects
    The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA (April 9-12, 2017).
  4. Naoki Yamashita, Zhipeng Ma, Seongsu park, Kentaro Kawai, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Formation of Gold Nanoparticle Dimers on Silicon by Sacrificial DNA Origami Technique
    The 12th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2017), Los Angeles, CA (April 9-12, 2017), pp.710-713.
    [abstract]
  5. Yoshikazu Hirai, Kenta Terashima, Katsuo Nakamura, Toshiyuki Tsuchiya, Osamu Tabata
    Low Temperature, Wafer-Level Process of Alkali-Metal Vapor Cells for Micro-Fabricated Atomic Clocks
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’17), Kaohsiung, Taiwan (18-22 June, 2017), pp.431-434.
    [abstract]
  6. Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
    Thermomechanical Noise of Arrayed Capacitive Accelerometers with 300-nm Gap Sensing Electrodes
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’17), Kaohsiung, Taiwan (18-22 June, 2017), pp.1002-1005.
    [abstract]
  7. Toshiyuki Tsuchiya, Koji Sugano, Hideki Takahashi, Hangyeol Seo, Yuriy Pihosh, Yutaka Kazoe, Kazuma Mawatari, Takehiko Kitamori, Osamu Tabata
    Dry Etching and Low-Temperature Direct Bonding Process of Lithium Niobate Wafer for Fabricating Micro/Nano Channel Device
    The 19th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’17), Kaohsiung, Taiwan (18-22 June, 2017), pp.1245-1248.
    [abstract]
  8. Toshiyuki Tsuchiya
    (Invited) MEMS Mirrors for automotive applications
    The 2017 International Meeting for Future of Electron Devices, Kansai (IMFEDK2017), Kyoto, Japan (29-30 June, 2017), pp. 82-83.
    [abstract]
  9. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Based Fabrication of Conformal Electrode Pairs for Thermotunneling Cooling
    The 2017 International Meeting for Future of Electron Devices, Kansai (IMFEDK2017), Kyoto, Japan (29-30 June, 2017), pp. 106-107.
    [abstract]
  10. Kenta Terashima, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Cs-Filled MEMS Cell Using Sequential Plasma Activated Bonding
    The 31st European Frequency and Time Forum and the 71st consecutive meeting of the IEEE International Frequency Control Symposium (EFTF-IFCS 2017), Besançon, France (9-13 July, 2017), pp.60-62.
    [abstract]
  11. Tatsuya Omaki, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Microfabrication of Embedding a Flexible Parylene-Based Microelectrode Array within Body-on-a-Chip
    The 31st EUROSENSORS (EUROSENSORS 2017), Paris, France (3-6 September, 2017), Proceedings 2017, 1(4), 302.
    [abstract]
  12. Toshiyuki Tsuchiya
    (Invited) Conformal nanogaps fabricated by cleavage of single-crystal silicon on MEMS
    The 43rd International Conference on Micro and Nanoengineering (MNE2017), Braga, Portugal (18-22 September, 2017)
  13. Toshiyuki Tsuchiya
    (Keynote) MEMS fabricated large-area nanogap for future energy devices
    The 3rd International Conference on Emerging Technologies: Micro to Nano (ETMN2017), Solapur, India (6-7 October, 2017)
  14. Yoshinori Takao, Kaito Nakagawa, Naoki Inoue, Kazuma Emoto, Toshiyuki Tsuchiya, Masayoshi Nagao
    Microfabrication of a Massive Emitter Array for Higher Thrust Density of Ionic Liquid Electrospray Thrusters
    The 35th International Electric Propulsion Conference (IEPC), Atlanta, GA, October 8 – 12, 2017, accepted.
  15. Toshiyuki Tsuchiya, Yuki Matsui, Yoshikazu Hirai, Osamu Tabata
    Bidirectional Hysteresis in Frequency Response of Arrayed Electrostatic MEMS Resonator
    The 30th International Microprocesses and Nanotechnology Conference (MNC 2017), Jeju, Korea (November 6-9, 2017), 8P-7-84.
  16. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Properties of Single Crystal Silicon Microstructure Fully-Coated by Plasma CVD Diamond-Like Carbon with Different Substrate Bias Voltages
    The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November 26–December 1, 2017), EM06.05.04.
  17. Amit Banerjee, Yasuaki Mori, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    A MEMS Based Approach for Fabricating Conformal Nanogap Electrodes for Thermotunneling Energy Harvesting Applications
    The 2017 MRS Fall Meeting and Exhibit, Boston, MA USA (November 26–December 1, 2017), ES09.03.28.

2016

  1. (invited) Toshiyuki Tsuchiya
    Mems Based Test-Stand Device for “Nano” Characterization
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B4L-A-1.
  2. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Mechanical Stability for the Connections of DNA Origami Using Anti-Parallel/Parallel Double Crossovers
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), A1L-C-5.
  3. Seongsu Park, Zhipeng Ma, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    A Multibody Brownian Dynamics for Modeling Size-Separation of dsDNA Fragment and DNA Origami Tiles in Anisotropic Nanosieving Array
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B1L-D-4.
  4. Hiromasa Yagyu, Do-Nyun Kim, Osamu Tabata
    New Coarse-Grained Molecular Dynamics Model of Double Stranded DNA Chain for DNA Origami
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B3P-B-6.
    [abstract]
  5. Kanji Yasuda, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Design Optimization of Integrated Shear Strain Gauge for Single-Crystal-Silicon Parallel Tensile-Testing Device
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B3P-B-53.
  6. Amit Banerjee, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Electromechanical Fabrication of Conformal Nanogap Electrodes for Thermotunnelling Cooling
    The 11th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2016), Sendai & Matsushima-bay, Miyagi, Japan (17-20 Apr. 2016), B3P-B-61.
  7. Toshiyuki Tsuchiya, Tetsuya Hemmi, Jun-ya Suzuki, Yoshikazu Hirai, Osamu Tabata
    Tensile Fracture of Integrated Single-Crystal Silicon Nanowire using MEMS Electrostatic Testing Device
    The 21st European Conference on Fracture (ECF21), Catania, Italy (20-24 June, 2016), 3.1.4.
    [abstract]
  8. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Crystallographic Orientations on Fractures and Slip Occurrences at 500 °C of (110) Single Crystal Silicon Microstructures
    The 21st European Conference on Fracture (ECF21), Catania, Italy (20-24 June, 2016), 3.1.6.
    [abstract]
  9. Akiko Uno, Vijay Kumar Singh, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Fabrication of MEMS Deformable Mirror Actuated by Electrostatic Piston Array
    The 8th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2016), Kanazawa, Japan (25-29 June, 2016), pp.113-114.
  10. Akiko Uno, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Deformable Mirror Actuated By Electrostatic Piston Array
    The 2016 International Conference on Optical MEMS and Nanophotonics (OMN 2016), Singapore (31 July-4 August, 2016), pp.55-56.
    [abstract]
  11. Kio Tahara, Yoshikazu Hirai, Hirofumi Shimizu, Toshiyuki Tsuchiya, Osamu Tabata
    Photoresist Micro-Chamber for the Diffracted X-Ray Tracking Method Recording Single-Molecule Conformational Changes
    Eurosensors2016, Budapest, Hungary (4-7 Septemnber, 2016), WL.FLU-10-8363.
    [abstract]
  12. Y. Pihosh, H. Seo, K. Mawatari, Y. Kazoe, O. Tabata, T. Tsuchiya, T. Kitamori
    High-Efficient Proton Conductor Nanochannels Array Based on a Ferroelectric Proton Trasnfer Phase Substrate Towards a μfuel Cell
    The 20th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS2016), Dublin, Ireland (9-13 October, 2016), accepted.
  13. Katsuo Nakamura, Yoshiakzu Hirai, Toshiyuki Tsuchiya, Oliver Paul, Osamu Tabata
    Simulation study of SU-8 Structures Realized by Single-Step Projection Photolithography
    IEEE Sensors 2016, Orland, FL (October 30-November 3, 2016), pp.139-141.
    [abstract]
  14. (Invited) Ken-ichiro Kamei, Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Integrated Heart/Cancer on a Chip: Towards in vitro recapitulation of side effects of anti-cancer drugs
    The 10th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE NANOMED 2016), Macau SAR, China (October 30 – November 2, 2016).
  15. Zhipeng Ma, Seongsu Park, Naoki Yamashita, Kentaro Kawai, Do-Nyun Kim, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Radial Mechanical Property of a Crossover Density-Varied DNA Nanotube
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 9B-2-2.
  16. Wenlei Zhang, Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Tensile Test of a Silicon Microstructure Fully Coated with Submicrometer-Thick DLC Film Using PECVD Method
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 9D-2-4.
  17. K. Nakagawa, T. Tsuchiya, Y. Takao
    Microfabricated Emitter Arrays for an Ionic Liquid Electrospray Thruster
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 10D-4-3.
  18. Amit Banerjee, Yoshiakazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    MEMS Fabricated Conformal Electrodes Attempting Thermotunnelling Refrigeration
    The 29th International Microprocesses and Nanotechnology Conference (MNC 2016), Kyoto, Japan (November 8-11, 2016), 11C-10-5.
  19. (Invited) Ken-ichiro Kamei Yoshiki Kato, Yoshikazu Hirai, Toshiyuki Tsuchiya, Yong Chen, Osamu Tabata
    Body on a Chip Towards Understanding of the Side Effects of Anti-Cancer Drug in Vitro
    The 29th Annual and International Meeting of Japanese Association for Animal Cell Technology (JAACT), Kobe, Japan (November 9-12, 2016).
  20. Seongsu Park, Sung Hee, Zhipeng Ma, Jongyoon Han, Toshiyuki Tsuchiya, Yoshikazu Hirai, Osamu Tabata
    On-Chip Separation of Triangular and Cylindrical DNA Origami Nanostructures Using Slanted Nanofilter Array
    2016 Annual Meeting of the AES Electrophoresis Society, San Francisco CA (November 14-16, 2016), 251s.
  21. Yu Nakano, Yoshikazu Hirai, Ken-ichiro Kamei, Toshiyuki Tsuchiya, Osamu Tabata
    Design and Fabrication of Ionic Liquid-Based Pressure Sensor for Evaluation of Vascularization of Micro-Tissues
    International Symposium on Micro-Nano Science and Technology 2016 (MNST2016), Tokyo, Japan (December 16-18, 2016), SaA1-B-1.
  22. Akio Uesugi, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Effect of Tensile Orientation on Slip and Fracture of (110) Silicon at High Temperature
    International Symposium on Micro-Nano Science and Technology 2016 (MNST2016), Tokyo, Japan (December 16-18, 2016), SuA1-A-2.
  23. Kanji Yasuda, Yoshikazu Hirai, Toshiyuki Tsuchiya, Osamu Tabata
    Integrated Shear Strain Gauge for Parallel Tensile-Mode Fatigue Testing Device
    International Symposium on Micro-Nano Science and Technology 2016 (MNST2016), Tokyo, Japan (December 16-18, 2016), SuA1-A-8.

2015

  1. A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata
    Size effect on brittle-ductile transition temperature of silicon by means of tensile testing
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal (18-22 Jan. 2015), pp.389-392.
    [abstract]
  2. K. Hokazono, Y. Hirai, T. Tsuchiya, O. Tabata
    ‌FET properties of single-walled carbon nanotubes individually assembled utilizing single strand DNA
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal (18-22 Jan. 2015), pp.417-420.
    [abstract]
  3. K. Sugano, D. Matsui, T. Tsuchiya, O. Tabata
    Ultrasensitive surface-enhanced raman spectroscopy using directionally arrayed gold nanoparticle dimers
    The 28th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2015), Estoril, Portugal (18-22 Jan. 2015), pp.608-611.
    [abstract]
  4. X. Ma, Y. Kato, Y. Hirai, F. Kempen, F. Keulen, T. Tsuchiya, O. Tabata
    Optimization method for 3D lithography process utilizing DMD-based maskless grayscale photolithography system
    SPIE Advanced Lithography 2015, San Jose, CA (22-26 Feb. 2015), 9426-14.
    [abstract]
  5. Z. Ma, Y.-J. Kim, S. Park, Y. Hirai, T. Tsuchiya, D.-N. Kim, O. Tabata
    Direct characterization of radial modulus of DNA nanotube by AFM nanoindentation
    The 10th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2015), Xi’an, China (7-11 Apr. 2015), pp.581-584.
    [abstract]
  6. Y. Mori, Z. Ma, S. Park, Y. Hirai, T. Tsuchiya, O. Tabata
    Selective assembly of DNA nanostructure bridging onto a trenched silicon substrate
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15), Anchorage, AK (21-25 Jun. 2015), pp.1389-1392.
    [abstract]
  7. Y. Kato, Y. Hirai, K. Kamei, T. Tsuchiya, O. Tabata
    Microfluidic device to interconnect multiple organs via fluidic circulation: Towards Body-on-a-Chip
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15), Anchorage, AK (21-25 Jun. 2015), pp.1549-1552.
    [abstract]
  8. Y. Matsui, Y. Hirai, T. Tsuchiya, O. Tabata
    A sub-micron-gap SOI capacitive accelerometer array utilizing size effect
    The 18th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’15), Anchorage, AK (21-25 Jun. 2015), pp.2212-2215.
    [abstract]
  9. X. Ma, Y. Kato, F. van Kempen, Y. Hirai, T. Tsuchiya, F. van Keulen, O. Tabata
    Multiple patterning with process optimization method for maskless DMD-based grayscale lithography
    The 29th EUROSENSORS (EUROSENSORS 2015), Freiburg, Germany (6-9 Sep. 2015), in Procedia Engineering, Vol.120, pp.1091-1094.
    [abstract]
  10. T. Hemmi, Y. Hirai, T. Tsuchiya, O. Tabata
    Batch Integration Process of A Free-Standing Silicon Nanowire to MEMS
    The 26th Micromechanics and Microsystems Europe workshop (MME 2015), Toledo, Spain (20-23　September, 2015), Paper No. B6, p. 29.
  11. H. Seo, Y. Pihosh, Y. Kazoe, K. Mawatari, K. Kitamura, O. Tabata, T. Tsuchiya, T. Kitamori
    Development of High-Efficient Proton Conductor Nanochannels Array Based On Ferroelectric Material
    The 19th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2015), Gyeongju, Korea (25-29　October, 2015), pp.1124-1126.
  12. Z. Ma, N. Yamashita, S. Park, K. Kawai, Y. Hirai, T. Tsuchiya, O. Tabata
    Programmable Polymerization of DNA Origami Structures with Double Crossovers Connection
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (10-13 November, 2015), 12-P-7-77.
  13. S. Park, Z. Ma, N. Yamashita, K. Kawai, D.-N. Kim, Y. Hirai, T. Tsuchiya, O. Tabata
    A Constrained Rigid Body Brownian Dynamics Simulation for On-Chip Size-Separation of Cross-linked DNA Origami Tiles
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (10-13 November, 2015), 13P-11-118L.
  14. A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata
    Parallel Tensile-Mode Fatigue Testing of Silicon Microstructures with Integrated Piezoresistive Stain Sensors
    The 28th International Microprocesses and Nanotechnology Conference (MNC 2015), Toyama, Japan (10-13 November, 2015), 13P-11-124L.

2014

  1. A. Uesugi, T. Yasutomi, Y. Hirai, T. Tsuchiya, O. Tabata
    Brittle-ductile transition of single crystal silicon micro structure under tensile stress below 600°C
    The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (29 Jun. – 2 Jul. 2014), 3-1.
  2. X. Ma, Y. Kato, Y. Hirai, F. Kempen, F. Keulen, T. Tsuchiya, O. Tabata
    An optimization approach for 3D photolithography utilizing DMD maskless exposure system
    The 7th Asia-Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2014), Daegu, Korea (29 Jun. – 2 Jul. 2014), 6-1.
  3. T. Tsuchiya
    Towards batch assembly and integration of single-walled carbon nanotubes to micro-electromechanical devices
    2014 CMOS Emerging Technologies Research, Grenoble, France (6-8 Jul. 2014).
  4. T. Tsuchiya, V.K. Singh, Y. Hirai, O. Tabata
    Large-displacement electrostatic deformable mirror with movable bottom electrodes
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (17-21 Aug. 2014), pp.119-120.
    [abstract]
  5. Y. Kogita, Y. Hirai, O. Tabata, T. Tsuchiya
    Double-side-drive electrostatic optical chopper for time-resolved raman spectroscopy
    The 2014 International Conference on Optical MEMS and Nanophotonics (OMN 2014), Glasgow, Scotland (17-21 Aug. 2014), pp.65-66.
    [abstract]
  6. Y. Hirai, D. Takagi, S. Anai, Y. Chihara, T. Tsuchiya, K. Fujimoto, Y. Hirao, O. Tabata
    Photoresist-based microfluidic cell sorter for photodynamic urine diagnosis EUROSENSORS 2014, Brescia, Italy (7-10 Sep. 2014), in Procedia Engineering, Vol.87, pp.62-65.
    [abstract]
  7. Y. Pihosh, N. Kabeta, K. Mawatari, Y. Kazoe, K. Kitamura, O. Tabata, T. Tsuchiya, T. Kitamori
    Development of a high efficient proton conductor media using extended-nano space under the outer electric field
    The 18th International Conference on Miniaturized Systems for Chemistry and Life Sciences (MicroTAS 2014), San Antonio, TX (26-30 Oct. 2014), pp.1236-1239.
  8. H. Maekoba, H. Murakami, T. Tsuchiya
    Fast system-level analysis for a piezoelectric angular rate sensor
    The 4th international workshop on Piezoelectric MEMS, Kobe, Japan (28-29 Oct. 2014), O-3.
  9. A. Uesugi, Y. Hirai, T. Tsuchiya, O. Tabata
    Tensile testing in vacuum with concentrated infrared light heating for single crystal silicon mechanical characterization at high temperature
    The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Fukuoka, Japan (4-7 Nov. 2014), 6C-5-1.
  10. K. Sugano, D. Matsui, T. Tsuchiya, O. Tabata
    Highly-sensitive surface enhanced raman spectroscopy with directionally-arrayed gold nanoparticle dimers
    The 27th International Microprocesses and Nanotechnology Conference (MNC 2014), Fukuoka, Japan (4-7 Nov. 2014), 7P-11-90.

2013

  1. T. Akishiba, N. Tamura, T. Ichii, Y. Hirai, K. Sugano, T. Tsuchiya, H. Sugimura, O. Tabata
    DNA origami assembly on patterned silicon by AFM based lithography
    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan (20-24 Jan. 2013), pp.307-310.
    [abstract]
  2. A. Nakano, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, A. Umeda
    Rotational motion effect on sensitivity matrix of MEMS three-axis accelerometer for realization of concurrent calibration using vibration table
    The 26th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2013), Taipei, Taiwan (20-24 Jan. 2013), pp.645-648.
    [abstract]
  3. Y. Kato, Y. Hirai, F. van Kempen, F. van Keulen, K. Sugano, T. Tsuchiya, O. Tabata
    Novel process optimization approach for DMD-based grayscale 3D microstructuring photolithography
    The 10th International Workshop on High Aspect Ratio Micro and Nano System Technology (HARMNST 2013), Berlin, Germany (21-24 Apr. 2013), pp.192-193.
  4. K. Sugano, H. Katayama, Y. Hirai, T. Tsuchiya, O. Tabata
    SERS characterization based on silver nanoparticle dimer in microfluidic laminar flow for molecule trace detection
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’13), Barcelona, Spain (16-20 Jun. 2013), pp.1807-1810.
    [abstract]
  5. A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Effect of surface morphology and crystal orientations on fracture strength of thin film (110) single crystal silicon
    The 17th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’13), Barcelona, Spain (16-20 Jun. 2013), pp. 1946-1949.
    [abstract]
  6. A. Uesugi, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Fractography analysis of tensile tested (110) silicon prepared by different surface morphology and crystal orientations ASME 2013 International Technical Conference and Exhibition on Packaging and Integration of Electronic and Photonic Microsystems (InterPACK 2013), Burlingame, CA (16-18 Jul. 2013), IPACK2013-73271.
  7. M. Elwi Mitwally, T. Tsuchiya, O. Tabata, S. Sedky
    Improvement of tensile strength of freestanding single crystal silicon microstructures using localized harsh laser treatment
    The 26th International Microprocesses and Nanotechnology Conference (MNC 2013), Sapporo, Japan (5-8 Nov. 2013), 8P-11-107.
  8. D. Takagi, Y. Hirai, S. Anai, Y. Chihara, K. Fujimoto, T. Tsuchiya, Y. Hirao, O. Tabata
    Microfluidic cell sorter for photodynamic urine diagnosis
    The 7th IEEE International Conference on Nano/Molecular Medicine and Engineering (IEEE-NANOMED 2013), Phuket, Thailand (10-13 Nov. 2013), pp.22-26.
    [abstract]

2012

  1. T. Tsuchiya, O. Tabata, A. Umeda
    Dynamic sensitivity matrix measurement for single-mass SOI 3-axis accelerometer
    The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France (29 Jan. – 2 Feb. 2012), pp. 420-423.
    [abstract]
  2. A. Kitamura, Y. Hirai, K. Sugano, O. Tabata, T. Tsuchiya
    Are resonators suitable for energy harvesting? -Equivalent circuit analysis of nonlinear response of MEMS resonator
    The 25th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2012), Paris, France (29 Jan. – 2 Feb. 2012), pp.1213-1216.
    [abstract]
  3. T. Kataoka, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Tensile testing of SWCNT using thermal actuator clamped with electrolessly deposited gold layer
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.335-336.
  4. C. Huang, T. Akishiba, N. Tamura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Temperature dependency of DNA origami self-assembly rate
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.411-412.
  5. S. Nishino, Y. Takenaka, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Fabrication of nanogap electrodes by gold nanorod growth on substrate
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.652-653.
  6. H. Yagyu, Y. Hirai, A. Uesugi, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Modeling and elastic property simulation of epoxy-based negative photoresist using coarse-grained molecular dynamics
    The 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2012), Kyoto, Japan (5-8 Mar. 2012), pp.999-1000.
  7. P.T. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Vibration analysis of coupled vertical resonators for acceleration sensitivity reduction of out-of-plane vibratory gyroscopes
    2012 MRS Spring Meeting, San Francisco, CA (9-13 Apr. 2012), B7.5. [abstract]
  8. T. Tanemura, S. Yamashita, H. Wado, Y. Takeuchi, T. Tsuchiya, O. Tabata
    Out-of-plane bending reliability test for intrinsic mechanical strength of polycrystalline silicon thin film using etching-damage-less membrane
    2012 MRS Spring Meeting, San Francisco, CA (9-13 Apr. 2012), B9.2. [abstract]
  9. K. Kamei, Y. Hirai, Y. Makino, L. Liu, Q. Yuan, Y. Chen, O. Tabata
    Phenotypic modulation of pluripotent stem cells by microfabrication materials
    The International Society for Stem Cell Research (ISSCR) 10th Annual Meeting, Yokohama, Japan (13-16 Jun. 2012), T-2262.
  10. T. Tsuchiya
    (Invited) Material and Device Reliability in Si MEMS Sensors
    The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China (8-11 Jul. 2012).
  11. D. Matsui, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Investigation of nonlinear decrease of autofluorescence in negative thick-film resist
    The 6th IEEE Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2012), Nanjing, China (8-11 Jul. 2012), ac12000168.
  12. H. Yagyu, Y. Hirai, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Investigation of molecular diffusivity of photoresist membrane using coarse-grained molecular dynamics simulation
    The 26th International conference EUROSENSORS (EUROSENSORS XXVI), Krakow, Poland (9-12 Sep. 2012), in Procedia Engineering, Vol.47, pp.402-405.
    [abstract]

2011

  1. T. Ikehara, T. Tsuchiya
    Measurement of high-cycle fatigue lives of micrometer-sized single-crystal silicon specimens
    International Symposium on Plasticity and Its Current Applications, Puerto Vallarta, Mexico (3-8 Jan. 2011).
  2. K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Sacrificial microchannel sealing by glass-frit reflow for chip scale atomic magnetometer
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico (23-27 Jan. 2011), pp.368-371.
    [abstract]
  3. S. Kamiya, T. Tsuchiya, T. Ikehara, K. Sato, T. Ando, T. Namazu, K. Takashima Cross comparison of fatigue lifetime testing on silicon thin film specimens
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico (23-27 Jan. 2011), pp.404-407
    [abstract]
  4. A. Taniyama, Y. Hirai, K. Sugano, O. Tabata, T. Ikehara, T. Tsuchiya
    Local stress analysis of single crystalline silicon resonator using micro raman spectroscopy
    The 24th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2011), Cancun, Mexico (23-27 Jan. 2011), pp.449-452.
    [abstract]
  5. K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata
    High-speed pulsed mixing with high-frequency switching of pumping from three inlet microchannels
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.75-78.
    [abstract]
  6. Y. Hirai, Y. Nakai, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Epoxy-based permeable membrane fabrication for 3D microfluidic device
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.188-191.
    [abstract]
  7. C. Huang, T. Saeki, M. Endo, H. Sugiyama, C.-H. Weng, G.-B. Lee, K. Sugano, T. Tsuchiya, O. Tabata
    Configurable assembly of DNA origami on MEMS by microfluidic Device
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.203-206.
    [abstract]
  8. H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Equivalent circuit analysis of micromechanical resonator using comb transducer model with built-in displacement detection
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.1288-1292.
    [abstract]
  9. T.P. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Modal harmonic simulation of decoupled resonators for developing MEMS tuning fork gyroscope with low acceleration sensitivity
    The 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2011), Kaohsiung, Taiwan (20-23 Feb. 2011), pp.1297-1300.
    [abstract]
  10. K. Sugano, H. Yoshimune, A. Nakata, Y. Hirai, T. Tsuchiya, O. Tabata
    High-speed pulsed mixing with high-frequency switching of micropump driving and its application to nanoparticle synthesis
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.1773-1776.
    [abstract]
  11. T.P. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Analysis of acceleration sensitivity in MEMS tuning fork gyroscope
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.2006-2009.
    [abstract]
  12. K. Sugano, R. Hiraoka, T. Tsuchiya, O. Tabata, M. Klaumunzer, M. Voigt, W. Peukert
    Nanogap-controllable self-assembly of gold nanoparticles using nanotrench template
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.2570-2573.
    [abstract]
  13. Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata
    Negative-photoresist mechanical property for nano-filtration membrane embedded in microfluidics
    The 16th International Conference on Solid-State Sensors Actuators and Microsystems (Transducers’11), Beijing, China (5-9 Jun. 2011), pp.2706-2709.
    [abstract]
  14. Y. Hirai, A. Uesugi, Y. Makino, H. Yagyu, K. Sugano, T. Tsuchiya, O. Tabata
    Mechanical characterization of negative photoresist by nano-indentation for nano-filtration membrane
    The 9th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2011), Hsinchu, Taiwan (12-18 Jun. 2011), pp.62-63.
  15. K. Sugano, A. Nakata, H. Yoshimune, T. Tsuchiya, O. Tabata
    High-speed pulsed mixing with high-frequency switching of pumping from three micropumps ASME-JSME-KSME Joint Fluids Engineering Conference 2011 (AJK2011-FED), Hamamatsu, Japan (24-29 Jul. 2011).
  16. T.P. Singh, K. Sugano, T. Tsuchiya, O. Tabata
    Analysis of acceleration sensitivity in frequency decoupled MEMS tuning fork gyroscope EUROSENSORS XXV, Athens, Greece (4-7 Sep. 2011), in Procedia Engineering, Vol.25, pp.51-54.
    [abstract]
  17. T. Tsuchiya, H. Tokusaki, Y. Hirai, K. Sugano, O. Tabata
    Self-dependent equivalent circuit modeling of electrostatic comb transducers for integrated MEMS
    The 19th IFIP/IEEE International Conference on Very Large Scale Integration, Hong Kong (3-5 Oct. 2011), pp.208-213.
    [abstract]
  18. M.H. Kwan, S. Song, X. Lu, L. Lu, Y.K. Teh, Y.F. Teh, W.C. Chong, Y. Gao, W. Hau, F. Xeng, M. Wong, C. Huang, A. Taniyama, Y. Makino, S. Nishino, T. Tsuchiya, O. Tabata
    Designs for improving the performance of an electro-thermal in-plane actuator
    The 19th IFIP/IEEE International Conference on Very Large Scale Integration, Hong Kong, (3-5 Oct. 2011), pp.220-225.
    [abstract]
  19. H. Yagyu, Y. Hirai, A. Uesugi, Y. Makino, K. Sugano, T. Tsuchiya, O. Tabata
    Coarse-grained molecular dynamics simulation of epoxy-based chemically-amplified resist for MEMS application
    2011 MRS Fall Meeting, Boston MA, (28 Nov. – 2 Dec. 2011), MRS Proceedings 2012 1415 : mrsf11-1415-tt05-14 (6 pages).
    [abstract]

2010

  1. G. Lopez, T. Tanemura, R. Sato, T. Saeki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda
    DNA-Grafted-Polymer Mediated Self-Assembly of Micro Components
    The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (IEEE-NEMS 2010), Xiamen, China (20-23 Jan. 2010), pp.248-252.
    [abstract]
  2. R. Sato, T. Tanemura, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    DNA mediated self-assembly of micro-scale components and sites
    The 7th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures and Devices (FNANO 2010), Snowbird, UT (27-30 Apr. 2010), pp.11-12.
  3. T. Wakita, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata, T. Ikehara
    Crystal anisotropy on strength of single crystal silicon measured by tensile testing
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (6-9 Jul. 2010), pp.44.
  4. H. Tokusaki, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Component modeling of 2DOF comb transducer for equivalent circuit using built-in displacement detection
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (6-9 Jul. 2010), pp.160.
  5. K. Tsujimoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Sacrificial microchannel sealing by glass-Frit reflow for micromachined alkali gas-filled cell
    The 5th Asia-Pacific Conference on Transducers and Micro-Nano Technology (APCOT 2010), Perth, Australia (6-9 Jul. 2010), pp.211.
  6. Y. Hirai, Y. Nakai, K. Sugano, T. Tsuchiya, O. Tabata
    Embedded double-layered microchannel fabrication for microfluidic devices using developer permeability of negative thick-film resists
    The 24th International conference EUROSENSORS (EUROSENSORS XXIV), Linz, Austria (5-8 Sep. 2010), in Procedia Engineering, Vol.5, pp.854-857.
    [abstract]
  7. A.M.R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M.E.H. Eltaib, M.M. Sallam
    New compensation technique for
    The soft tissue stiffness measurements using two sensor probes configuration
    The 24th International conference EUROSENSORS (EUROSENSORS XXIV), Linz, Austria (5-8 Sep. 2010), in Procedia Engineering, Vol.5, pp.1304-1307.
    [abstract]

2009

  1. T. Tanemura, G. Lopez, R. Sato, K. Sugano, T. Tsuchiya, O. Tabata, M. Fujita, M. Maeda
    Sequential and selective self-assembly of micro components by DNA grafted polymer
    The 22nd IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2009), Solent, Italy(25-29 Jan. 2009), pp.184-187.
    [abstract]
  2. K. Sugano, T. Ozaki, R. Hiraoka, T. Tsuchiya, O. Tabata
    Fabrication of large-scale nanoparticle array using combination of self-assmbly and 2-step transfer International Conference on Electronics Packaging 2009 (ICEP 2009), Kyoto, Japan (14-16 Apr. 2009).
  3. R. Sato, T. Tabemura, G. Lopez, M. Serry, K. Sugano, T. Tsuchiya, O. Tabata
    Modeling of self-face-alignment process using contact potential difference International Conference on Electronics Packaging 2009 (ICEP 2009), Kyoto, Japan (14-16 Apr. 2009).
  4. Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Parameter optimization method for fabricating 3D microstructures embedded in single-layer negative-tone photoresist
    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denver, CO (21-25 Jun. 2009), pp.1616-1619.
    [abstract]
  5. Y. Nishimori, N. Fujiwara, H. Ooiso, T. Tsuchiya, G. Hachiguchi 3DOF equivalent circuit model of a comb-drive actuator
    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denver, CO (21-25 Jun. 2009), pp.1758-1761.
    [abstract]
  6. Y. Ura, K. Sugano, T. Tsuchiya, O. Tabata
    Tensile Testing of Fullerene Nano Wire using Electrostatic MEMS Device
    The 17th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’09), Denver, CO (21-25 Jun. 2009), pp.2062-2065.
    [abstract]
  7. Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    3-dimensional thick-resist microstructuring adopting wavelength dependency of photoresist property
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (25-28 Jun. 2009), pp.27-28.
  8. Y. Hirai, H. Yoshimune, K. Tsujimoto, K. Sugano, T. Tsuchiya, O. Tabata
    Microchannel embedded in glass-frit layer bonding for gas-filled sealed cavity
    The 8th International Workshop on High-Aspect-Ratio Micro-Structure Technology (HARMST 2009), Saskatoon, Canada (25-28 Jun. 2009), pp.153-154.
  9. A.M.R. Fath El Bab, K. Sugano, T. Tsuchiya, O. Tabata, M.E.H. Eltaib, M.M. Sallam
    Micro machined tactile sensor for soft tissue compliance detection
    The 23rd Conference EUROSENSORS 2009, Lausanne, Switzerland (6-9 Sep. 2009), in Procedia Engineering, Vol.1, pp.84-87.
    [abstract]
  10. M. Sato, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Capacitive micromachined ultrasonic transducers with novel membrane design
    The 23rd Conference EUROSENSORS 2009, Lausanne, Switzerland (6-9 Sep. 2009), in Procedia Engineering, Vol.1, pp.389-392.
    [abstract]
  11. T. Tsuchiya
    (invited) Technologies, applications, and reliabilities of microelectromechanical systems (MEMS)
    The 9th SEGJ International Conference, Sapporo, Japan (12-14 Oct. 2009), pp.22.

2008

  1. T. Ikehara T. Tsuchiya
    Crystal orientation dependence of fatigue characteristics in single crystal silicon measured using a rotating micro resonator
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.435-438.
    [abstract]
  2. T. Tsuchiya, T. Jomori, Y. Ura, K. Sugano O. Tabata
    Fabrication of free-standing fullerene nanowire using direct electronbeam writing and sacrificial dry etching
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.689-692.
    [abstract]
  3. Y. Higuchi, T. Kusakabe, T. Tanemura, K. Sugano, T. Tsuchiya, O. Tabata
    Manipulation system for nano/micro components integration via transpotation and self-assembly
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.836-839.
    [abstract]
  4. T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata
    Gold nanoparticle patterning by self-assembly and tranfer for LSPR based sensing
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.1048-1051.
    [abstract]
  5. T. Kusakabe, T. Tanemura, Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata
    DNA mediated sequential self-assembly of nano/micro components
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.1052-1055.
    [abstract]
  6. T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata
    Contact potential differnce for seqential assembly and face alignment of sub-millimater components
    The 21st IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2008), Tucson, AZ (13-17 Jan. 2008), pp.1056-1059
    [abstract]
  7. T. Tanemura, Y. Higuchi, T. Kusakabe, K. Sugano, T. Tsuchiya, O. Tabata, K.F. Bohringer
    Contact potential difference for face alignment of submillimeter components with chemical reaction kinetics
    The 5th Annual Conference on Foundations of Nanoscience: Self-Assembled Architectures & Devices (FNANO 2008), Snowbird, UT (22-25 Apr. 2008).
  8. Y. Uchida, K. Sugano, T. Tsutiya, O. Tabata
    Mixing speed-controlled gold nanoparticle synthesis using pulsed mixing microfluidic system with valveless micropumps
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), Tainan, Taiwan (23-26 Jun. 2008), 2C1-2.
  9. Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya and O. Tabata
    Modeling of positive-tone type thick-photoresist dissolution and squential development profile simulation
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), Tainan, Taiwan (23-26 Jun. 2008), 3E1-3
  10. H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata
    Y-axis vibrating SOI gyroscope using vertical comb electrodes
    The 4th Asia Pacific Conference on Transducers and Micro/Nano Technologies (APCOT 2008), Tainan, Taiwan (23-26 Jun. 2008), 1B2-6
  11. A.M.R. Fath El Bab, T. Tamura, K. Sugano, T. Tsuchiya, O. Tabata, M.E.H. Eltaib Mohamed M. Sallam
    Design and simulation of a tactile sensor for soft-tissue compliance detection
    The First Japan-Egypt International Symposium on Science and Technology 2008 (EJICST 2008), Tokyo, Japan (8-10 Jun. 2008), pp.144.
  12. Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    3-dimensional positive thick-resist microstructuring adopting wavelength dependency of photoresist property
    The 22nd international conference EUROSENSORS (EUROSENSORS XXII), Dresden, Germany (7-10 Sep. 2008), pp.1559-1602.
  13. A. Nakata, S. Tanaka, K. Sugano, T. Tsuchiya, O. Tabata
    Electrical equivalent circuit model of microfluidic system containing piezoelectric valveless micropump and viscoelastic PDMS microchannel
    The 12th International Conference on Miniturized System for Chemistry and Life Sciences (MicroTAS 2008), San Diego, CA (12-16 Oct. 2008), pp.730-732.

2007

  1. K. Sugano, W. Sun, T. Tsuchiya, O. Tabata
    Design and analysis of resonance transition radiation X-ray source for tabletop synchrotron
    The 2nd International Symposium on Portable Synchrotron Light Sources and Advanced Applications, Kusatsu, Japan (15 Jan. 2007).
  2. Y. Higuchi, K. Sugano, T. Tsuchiya, O. Tabata
    Temperature controlled capillary driven sequential stacking self-assembly using two different adhesives
    The 6th International IEEE Conference on Polymer and Adhesives in Microelectronics and Photonics (IEEE Polytronic 2007), Tokyo, Japan (15-18 Jan. 2007), pp.128-132.
    [abstract]
  3. T. Ozaki, K. Sugano, T. Tsuchiya, O. Tabata
    Versatile method of sub-micro particle pattern formation using self-assembly and two-step transfer
    The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan (21-25 Jan. 2007), pp.353-356.
    [abstract]
  4. K. Miyamoto, T. Jomori, K. Sugano, O. Tabata, T. Tsuchiya
    Mechanical calibration of MEMS spring with 0.1-μn force resolution
    The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan (21-25 Jan. 2007), pp.227-230.
    [abstract]
  5. Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya
    Tensile-mode fatigue tests and fatigue life predictions of single crystal silicon in humidity controlled environments
    The 20th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2007), Kobe, Japan (21-25 Jan. 2007), pp.267-270.
    [abstract]
  6. T. Tsuchiya
    (Tutorial) MEMS reliability
    The 20th International Conference on Microelectronic Test Structures, Tokyo, Japan (19-22 Mar. 2007).
  7. Y. Inamoto, Y. Hirai, K. Sugano, T. Tsuchiya, O. Tabata
    Moving-mask UV lithography and embedded microchannels
    The 7th International Workshop on High Aspect Ratio Micro Structure Technology (HARMST 2007), Besancon, France (7-9 Jun. 2007), pp. 31-32
  8. Y. Hirai, Y. Inamoto, K. Sugano, T. Tsuchiya, O. Tabata
    Moving-mask UV lithography for 3-dimensional positive- and negative-tone thick photoresist microstructuring
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.545-568.
    [abstract]
  9. T. Ikeda, K. Sugano, T. Tsuchiya and O. Tabata
    Tensile testing of single crystal silicon thin films at 800oC using IR heating
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.571-573.
    [abstract]
  10. S. Tanaka, O. Ichihashi, K. Sugano, T. Tsuchiya, O. Tabata
    Analysis of valveless piezoelectric micropump using electrical equivalent circuit model
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.2183-2186.
    [abstract]
  11. H. Hamaguchi, K. Sugano, T. Tsuchiya, O. Tabata
    A differential capacitive three-axis SOI accelerometer using vertical comb electrodes
    The 16th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’07), Lyon, France (10-14 Jun. 2007), pp.1483-1486.
    [abstract]
  12. T. Ikehara, T. Tsuchiya
    Parallel fatigue test of micromachined single crystal silicon using lateral resonating device
    MicroNanoReliability 2007 Conference, Berlin, Germany (2-5 Sep. 2007), pp.107
  13. T. Tsuchiya
    (invited) Mechanical reliability of micro/nano-structures in MEMS devices
    20th International Microprocesses and Nanotechnology Conference (MNC 2007), Kyoto, Japan (5-8 Nov. 2007).
  14. T. Tsuchiya, T. Jomori, K. Sugano, O. Tabata
    Fabrication of free-standing fullerene nanowire using direct electron beam writing and sacrificial dry etching
    2007 MRS Fall Meeting, Boston, MA (25-30 Nov. 2007), II5.47
  15. K. Miyamoto, K. Sugano, T. Tsuchiya, O. Tabata
    Effect of surface oxide layer on mechanical properties of single crystalline silicon
    2007 MRS Fall Meeting, Boston, MA (25-30 Nov. 2007), DD2.3
    [abstract]

2006

  1. K. Sugano, H. Yamada, O. Ichihashi, T. Tsuchiya, O. Tabata
    Fabrication of gold nanoparticle using pulsed mixing method with valveless micropumps
    The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey (22-26 Jan. 2006), pp.546-549.
    [abstract]
  2. W. Yoshikawa, A. Sasabe, S. Koji, T. Tsuchiya, O. Tabata, A. Ishida
    Vertical Drive Micro Actuator Using SMA Thin Film for a Smart Button
    The 18th IEEE International Conference on Micro Electro Mechanical Systems (MEMS 2006), Istanbul, Turkey (22-26 Jan. 2006), pp.734-737.
    [abstract]
  3. Y. Yamaji, K. Sugano, O. Tabata, T. Tsuchiya
    Tensile and tensile-mode fatigue test of single crystal silicon in various environment
    The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006), Singapore (25-28 Jun. 2006).
  4. K. Sugano, W. Sun, T. Tsuchiya, O. Tabata
    Design and analysis of soft X-ray source using resonance transition radiation for tabletop synchrotron
    The 3rd Asia-Pacific Conference of Transducers and Micro-Nano Technology (APCOT 2006), Singapore (25-28 Jun. 2006).

2005

  1. T. Tsuchiya
    (Invited) Tensile testing of MEMS materials
    The 13th International Conference on Solid-State Sensors, Actuators and Microsystems (Transducers’05), Seoul, Korea (5-9 Jun 2005), pp.1953-1956.
    [abstract]
  2. T. Tsuchiya
    Mechanical testing of integrated microsystems
    FIS conference on future integrate systems, Cambridge, UK (8-11 Aug. 2005), pp.57-58.

2004

  1. T. Tsuchiya
    Mechanical reliability evaluation and its standardization of thin films used in MEMS
    CANEUS 2004 Conference on Micro-Nano-Technologies, Monterey, CA (1-5 Nov. 2004).
    [abstract]

2003

2002

2001

2000

1999

1997

  1. T. Tsuchiya, O. Tabata, J. Sakata, Y. Taga
    Specimen size effect on tensile strength of surface micromachined polycrystalline silicon thin films
    The 10th Micro Electro Mechanical Systems Workshop (MEMS 1997), Nagoya, Japan (26-30 Jan. 1997), pp.529-534.
    [abstract]

2015年3月12日