Acceleration sensitivity of tuning fork gyroscope
We investigated the source of acceleration sensitivity in fabricated tuning fork gyroscope (TFG) by ...
Developing MEMS Tuning fork gyroscope with low acceleration sensitivity
MEMS technology provide us low cost, high functionality, small size, and easily integrated with ASIC ...
Equivalent Circuit of Comb Resonators Applicable for Non-Linear Response at Large Displacement
MEMS (Micro Electro Mechanical System) devices are fabricated with microfabrication method, and cont ...
Equivalent Circuit Analysis for Electrostatic Vibrating Gyro with Self-contained Comb Transducer Component Model
We aim to design electrostatic vibrating gyroscopes by using an electrical equivalent circuit analys ...
Design and Analysis of Capacitive Vibrating Gyro using Electrical Equivalent Circuit
In this research, we aim to design the electrostatic gyro sensor including controlled voltages as de ...
Three-axis capacitive accelerometer
Performance requirements for seismometer are high resolution, low noise level, durability and so on. ...
Electrical equivalent circuit of electrostatic transducer
Electrostatic MEMS devices which are constructed from mechanical structure, electrical circuit and e ...